(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: Back, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

ZP

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Vacuum System Peripherals:

VX2250 VX2350 1 8 1 4 2 , 0.58 , 1 8 1 4 1.3 3 , 1 4 3 8 1.3 ZX , 1 8 1 4 2.6 ZR 4.5 ZM , 1 4 3 8 2.6 Series VX21 Series VX22 Series VX23 ZH , 1 4 3 8 6 4.3 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL , 1 4 3 8 6.4 8 8.8 11 8.8 11 1 4 M V ZY N.C.

ZP

(mm) 6 tube M14 x 1 20 to 50 8 tube Ball joint rotation 15 Buffer Type Pad dia. (mm) 10 to 16 20 to 50 M10 x 1 M14 x 1 Mounting 10, 20, 30, 40, 50 10, 20, 30, 50 Stroke (mm) 0 stroke 0 stroke Spring reactive 2.0 N 1.0 N Stroke end Stroke end force 5.0 N 3.0 N With no non-rotating (J), With non-rotating (K) Non-rotating specification Weight (g) Vacuum entry port Pad dia.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Mounting 25, 50, 75 Connection 25, 50, 75, 100 Stroke (mm) Male thread ZR Thread dia. 40, 50 0 stroke 0 stroke M18 x 1.5 6.9 N 10 N Spring reactive force ZM 63, 80 M18 x 1.5 Full stroke Full stroke 11.8 N 15 N Rotating (J) 100, 125 M22 x 1.5 Non-rotating specification ZMA Vacuum entry port (Rc, NPT, NPTF) 1 8 ZQ Pad Type ZH ZU Pad diameter (mm) 40, 50, 63, 80, 100, 125 NBR (Black), Silicone

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

ZPT/ZPX

Force Silicon rubber Urethane rubber First mounting load 6.9 N 40 to 80 Fluoro rubber Second mounting load 11.8 N EPR 10 N First mounting load 100, 150 15 N Second mounting load 13-11-89 8 Series ZPT 40 50 63 80 ZPT HBJ-B01-A18 (Male thread) ZPT HBJ-B01-A18 (Male thread) Rc 1/8 Hexagon width across flats 14 Rc 1/8 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width

Ejector Valve Unit Series ZYY/ZYX 1

Series ZYX3000 Series ZYY3000 13-8-1 2 Electronic Pressure Switches Precautions 1 Be sure to read before handling. Wiring Design & Selection Warning Warning 1. Confirm wire colors and terminal numbers when wiring is performed.

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: T (Panel Mount Adapter for w/o Flow Adjustment Valve