Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

stations Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

7.5

For the wiring to power supply terminal, refer to back page 9. 26 Series SJ2000/3000 PC Wiring System with Power Supply Terminal Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc

SX

-42 Rc 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.20 0.20 0.45 0.43 0.66 C6 C6 C8 C8 C10 P N 1 8 Rc Rc P N P N P N Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1 4 1 4 1 4 Rc Rc Internal Wiring of Manifold Station 12 Station 4 Station 3 Station 2 Station 1 Coil

0.4

59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 one-touch fitting assembly (41.5) C8: 8 one-touch fitting assembly C8: 8 one-touch fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156 175 185.5

SYJ3000/5000/7000

0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold

SYJ300/500/700

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

Valve Single Unit

SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually

Valve Single Unit

SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

For the wiring to power supply terminal, refer to back page 9. 26 Series SJ2000/3000 PC Wiring System with Power Supply Terminal Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

5 Port Solenoid Valve

silencer M5 external pilot port Stations 1 2 3 4 5 6 7 8 n D side U side Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamping screw 3 8.2 23.5 1 13.8 (12) 4.9 8.5 (7.5) 23.1 (n-1) x 8.5 7.3 2n x C6, C8, N7, N9 (1(P), 3(R) port) C6: 6 one-touch fitting C8: 8 one-touch fitting N7: 1/4" one-touch fitting N9: 5/16" one-touch

VFR

/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [

Fieldbus System

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

28.5 G 1/2 VQC VQZ SQ 163.3 VFS 3 1 5 64 52.5 VFR 45 27 VQ7 48 48 1/8" (Bleed port) (Double, 3 position: PE port) 1/8" (PE port) 69.5 69.5 2 position double: VFR621 -E, VFR621 -D(Z) 0 1 0 1 3 position closed center: VFR631 -E, VFR631 -D(Z) 3 position exhaust center: VFR641 -E, VFR641 -D(Z) 3 position pressure center: VFR651 -E, VFR651 -D(Z) 0 1 0 1 0 1 0 1 0 1 0 1 196.1 232 Electrical entry

Valve Single Unit

SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually

SYJ300/500/700

Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (