Compact and Lightweight

-04 24 24 142.6 74.9 44.1 Rc1/2 Rc1/2 Metric ZH05DA-N01-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9

High-Precision Digital Pressure Switch

pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 28 ZSE20(F)/ISE20 Series Function Details

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Series PSE300 Internal Circuit PSE30 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE33 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k DC (+) DC (+) (Brown) Analog output (Brown) Analog output Load Load (Gray

A

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

IIIIIII

o F O F 5 73 lbs (2 6 kg) P T 0 216 in (5 5 mm) N T 0 039 in (1 mm) T T , 0 256 in (6 5 mm; A B c D E F G H J K M N 1.20 30.5' ).2, (6) 4.41 ' 1 1 2 ' 3 . 1 9 (81) 1 1 0 (28) 1.22 (31) 0.06 (1.5) 0.1: (3) 1 . 5 7 (40) 1.06 (27) 1 4 2 (36) 1 . 2 6 3.05 (77.5 Millimeters in Parentheses Millimeters in Parentheses "32) NVM430-N01-36 T U T 4 41 lbs (2 ks) T T 90' A B c D E F G H J K M N P 5.43

Mechanical Valves Series NVM, NVFM, NVZNI

o F O F 5 73 lbs (2 6 kg) P T 0 216 in (5 5 mm) N T 0 039 in (1 mm) T T , 0 256 in (6 5 mm; A B c D E F G H J K M N 1.20 30.5' ).2, (6) 4.41 ' 1 1 2 ' 3 . 1 9 (81) 1 1 0 (28) 1.22 (31) 0.06 (1.5) 0.1: (3) 1 . 5 7 (40) 1.06 (27) 1 4 2 (36) 1 . 2 6 3.05 (77.5 Millimeters in Parentheses Millimeters in Parentheses "32) NVM430-N01-36 T U T 4 41 lbs (2 ks) T T 90' A B c D E F G H J K M N P 5.43

AS

30.9 AS231F-01-04SD AS231F-N01-01SD 4 1/8" 8.4 9.3 24.9 21 24.4 12 R 1/8 12.7 5/32" 9.3 13.1 9.3 17.5 14.2 7.2 1.2 31.6 22 30.9 34.7 AS231F-01-06SD AS231F-N01-03SD 6 22.9 10.9 14 13.5 11.6 26.9 36.3 24.9 22 AS231F-01-08SD AS231F-N01-05SD 1.2 8 NPT 1/8 12.7 14 31.6 7.2 16.5 10.9 23.9 3/16" 11.4 14 28.2 16.2 12.9 18.5 15.2 30.9 25 40.8 37.3 34.7 26.8 AS231F-02-04SD AS231F-N01-07SD 4 1/4" 13.2

Table of Contents

40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V]

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

VM

8 NPT N01 1 8 Be sure to read before handling.

Booster Regulator/Air Tank

Product Not Applicable to the ASME Standard VBAT 05 N 1 A X11 SV Tank internal capacity Product not applicable to the ASME standard Option Symbol Symbol 05 10 Internal capacity 5 L 10 L Option None Note 1) Nil V S Drain valve Note 1) Safety valve (Set pressure: 2 MPa) Note 1) Material Symbol A Safety valve (Set pressure: 2 MPa) Note 2) Drain valve SV Material Carbon steel (SS400) Note 1)

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

PSxx-OMU0005CN

B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S

9.8

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

2-Color Display

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.

Digital Pressure Switch

output type-2 output Max. 80 mA Residual voltage 1 V or less T: Analog output 1 to 5 V Output impedance 1 k V: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V or less -Y (Copy

Digital Pressure Switch

output type-2 output Max. 80 mA Residual voltage 1 V or less T: Analog output 1 to 5 V Output impedance 1 k V: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V or less -Y (Copy

PSxx-OMS0006CN

(ZS-46-A1) 3X8L A B(ZS-46-A2) 3X8L B -14No.PS-OMS0006CN-G (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -15No.PS-OMS0006CN-G (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 1~1.5Nm -16No.PS-OMS0006CN-G -17No.PS-OMS0006CN-G ,FG -18No.PS-OMS0006CN-G Z/ISE20(F)-N NPN 1 Max.28 V80 mA 1 V -P PNP 1 Max.80 mA 1 V -19No.PS-OMS0006CN-G [] 3 0.2 [] / OUT1 OUT1 [F10]30 (

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.