PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 615 Series AS20-T Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220

HRX-OM-X010

Save this manual at a designated place for reference when necessary. HRZ Series 1.1 Before Using this System 1-1 1-1 HRX-OM-X010 Chapter 1 Safety 1.2 Danger, Warning, and Caution Used in This Manual 1.2.1 Hazard Levels This system is designed with its first priority being the safety of workers and the prevention of system damage.

HRX-OM-M005

8 Appendix 8.1 Specification 8.1.1 Product specification Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW

Large Capacity Compressed Air Filters Series AFW

175 D Flanged Models Threaded Models 1/4 N/A 5.5 1-1/4 5.91 18.11 1.65 4.80 476 AFW275-N12D-WS 280 1/4 N/A 5.5 1-1/2 5.91 18.11 1.65 4.80 545 AFW325-N14D-WS 320 1/4 N/A 8.8 1-1/2 7.09 18.98 2.05 5.75 680 AFW400-N14D-WS 400 A 1/4 N/A 8.8 2 7.09 18.98 2.05 5.75 1,189 AFW700-N20D-WS 700 1/4 N/A 18.7 2-1/2 7.87 23.43 2.64 8.27 1,445 AFW850-N25D-WS 850 B 1/4 N/A 18.7 3 7.87 23.43 2.64 8.27 2,550

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

VR4151/4152

4 NBR y u Brass 5-7-1 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Single pilot 2 1 Double pilot Number of ports 5 port 5 Dimensions Side ported Bottom ported Stroke 2 mm Stroke 2 mm Indicator light Indicator light Manual override (Button diameter

VM

How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 Rc 01 1 8 Roller lever 01 1 8 NPT N01 Adjustable roller lever 13 G F01 1 8 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.

Refrigerated Thermo-chiller

fluid temperature (C) Heating Capacity HRZ010-WS/010-W1S/010-W2S 7 HRZ010-WS 6 Heating capacity (kW) 5 HRZ010-W1S 4 3 HRZ010-W2S 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Pump Capacity (Thermo-chiller Outlet) HRZ010-WS HRZ010-W1S 1 0.5 [Outlet port: Max.]

CLK1

1) If connections are reversed on a 2 wire type switch, the switch will not be damaged if protected by a protection circuit, but the switch will always stay in an ON state.

Clamp Cylinder with Lock Series CLK1

B 50 100 Without Auto Switch CLK1 G A 50 100 B53 B With Auto Switch Number of auto switches Clamp cylinder with auto switch Clevis width 2 pcs. 1 pc.

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

SGC200-OMJ0004

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 2 SGC200*-OMJ0004-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 80100 ( ) 1) 1) 1) 1) 2) 2) 2) 2) 5 3) 3) 3) 3) , , , , 4) 4)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow

Table of Contents

(72) 144 179 91 20 70 [71.5] 60 60 11 2, 3 24 [23] 2n-Rc 1/2, 3/4 20 91 179 L1 L2 9 (Electrical entry) (A, B port) R5.5 Manual override (Non-locking) D side 21 B B B B Manual override (Non-locking) n A A A B B B A A A A 3 1 2 2 P = 51 (Pitch) 1 3 6 [2] n Stations R 1 1/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 U side External pilot

VFR

0 e (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Exhaust center: VFR640 (B) (A) 4 2 (EA)(P) (EB) 5 1 3 o r Pressure center: VFR650 (B) (A) 4 2 PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE This figure shows a closed center type. (EA)(P)(EB) 5 1 3 Component Parts Material Aluminum die-casted Note No. No.

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

FILTER REGULATOR

Port thread Rc C2SF-6J-A Rc C2SF-6CJ-A G C2SFF-6J-A G C2SFF-6CJ-A 1/8 1/8 NPT C2SFN-6J(Z)-A NPT C2SFN-6CJ(Z)-A HEX14 HEX14 Option Semi-standard Semi-standard 2 Semi-standard 2J Part no. Part no.

FILTER REGULATOR

Rc C2SF-J-A Rc C2SF-CJ-A G C2SFF-J-A G C2SFF-CJ-A External NPT C2SFN-J(Z)-A NPT C2SFN-CJ(Z)-A B B appearance drawing and Semi-standard 6J Semi-standard 6CJ part no. Port thread Port thread Part no. Part no. Rc C2SF-6J-A Rc C2SF-6CJ-A G C2SFF-6J-A G C2SFF-6CJ-A 1/8 1/8 NPT C2SFN-6J(Z)-A NPT C2SFN-6CJ(Z)-A HEX14 HEX14 Option Semi-standard Semi-standard 2 Semi-standard 2J Part no. Part no.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

3 O-ring NBR u 15-9-105 15 Dimensions L4 D3 H (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 27.4 0.7 10.3 31 10 4.5 9 8 9 AS220-N01-ST NPT 1/8 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 R 1/8 12 14.3 31.6 1.5 14.1