Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

1

OFF 45 Max. 6 ON 44 Symbol 2 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 3 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F.O.F.* 20 N T.T. 45 INDEX 330 Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A

2

Symbol AKM A 00 30 01 q e w Check valve Symbol Description q Body size 20 30 40 A Nil Rc V V V N NPT V V V F G V V V + w Pipe thread type D 01 1/8 V V 02 1/4 V V V 03 3/8 V e By-pass port size By-pass port size for redirecting air flow Specifications Model By-pass port size A B C D E Applicable model E Model Effective area (mm2) AKM2000-A 28 AKM3000-A 55 AKM4000-A 111 AKM2000-A 1/8, 1/

Table of Contents

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

CATALOG

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

4/5 Port Solenoid Valve

Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)

Table of Contents

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-01, 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P=17.5 9 18 P=17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A L2 L1 5 (Pitch) P=17.5 21 + 13.8 15.2 + (4.9) 5.3 7.3 68.1 100.2 [102.4] (For mounting) 4 x 4.5 27.7 20 139.6 [144] 20 20 37.7 66.7 B B P EB EA B B B 127 [131.4] 100.5 A A A A A 16 Manual override (P , EA, EB port) 1/4 +

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Table of Contents

F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly 11 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 AXT625-3A-20 End plate (D) !