Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate

1

, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" (Station 1) (Station n) 59.5 P 1 P 1 B 45.5 2 2 B 2 B 2 B 2 B 24.6 E E 23 A 4 A 4 A 4 A 4 A 4 10 8.6 11.8 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 18.3 13.5 18.3 L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 47 x n2 + 81 n1: Valve stations n2

5-Port Solenoid Valve

+ 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 + 48 L6 = b x n3 + c E 3/5 2 B 2 B 2 B EX600 B 2 B 2 Fitting dimensions for panel mounting Refer to panel fitting dimensions for details.

Electric Actuator with Integrated Guide

Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPH100--X10 LTF6EPH200--X10 LTF6EPH300--X10 LTF6EPH400--X10 LTF6EPH500--X10 LTF6EPH600--X10 2 3 4 5 6 7 1.

5 Port Solenoid Valve

2n x C2, C3, C4, N1, N3 <4(A), 2(B) port> C2: 2 one-touch fitting C3: 3.2 one-touch fitting C4: 4 one-touch fitting N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 DIN rail clamping screw L1: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6

5 Port Solenoid Valve Series SV1000/2000/3000/4000

139.9 L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4) /2 L6 = 20.5 x n1 + 56 L7 = 21 x n2 + 83.5 A A A A B A B A B A B A Valve stations (n1) L1: DIN Rail Overall Length 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 585.5 610.5 635.5 648 673 698 723 735.5 760.5 573 585.5 610.5 635.5 660.5 673 698 723 735.5 548 573 598

Fieldbus System

A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 n1: Valve stations n2: I/O Unit stations L1: DIN Rail Overall Length [mm] Valve I/O stations Unit (n1) stations

Compact 5-Port Solenoid Valve

C6: 6 (SMC) (Station n) (Station 1) 0 BUS 13.6 9.1 D D B 2 1 59.9 3/5 E 3/5 60 B 2 B 2 B 2 B 2 E 2 P 1 PWR 25.8 23.9 A 4 A 4 A 4 A 4 A 4 1 P 3 S 13.2 8.9 (21) (7.5) (11.8) (For DIN rail mounting) 4 x M8 3-pin socket 2 x M12 M3 (Pitch) P = 9 23 11.5 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring L1 = 9 x n1 + 139 + 21 x n2 L2 = 9 x n1 + 43.4 L4 = L3 10.5

LEC-OM02704CN

RYnF CR RXnF RY(n1)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B 2 B 2 B 2 B 2 49.9 30.6 E E 25.2 A 4 A 4 A 4 A 4 A 4 20.5 12 7.5 (Pitch) P = 16 One-touch fitting [4(A), 2(B) port] L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 47 x n2 + 81.5 17.5 20.5 Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Fieldbus System

A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 DIN rail clamping screw L1: DIN Rail Overall Length (mm) Valve stations I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

0.4

fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348

Series SV

With external pilot specification (Pitch) 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 PE PE X x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, N1 4, N3 6, N7 One-touch fitting

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Air Cylinder Series CM2

2) 2 15 + 45 10 15 60 60 + 45(n 2) (n=2, 4, 6) CJ2 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 CM2 10 15 65 65 + 50(n 2) (n=2, 4, 6) CG1 (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55(n 2) 10 15 75 (n=2, 4, 6) MB (n 2) 2 20 + 50 D-B59W 75 + 55(n 2) 15 20 75 MB1 (n=2, 4, 6) D-A3A(2) D-G39A D-K39A D-A44A CA2 35 + 30(n 2) 100 + 100(n 2) 10 35 100 CS1 Note 1) Auto switch mounting (The adjustment as

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use