Model Selection 1

LQ-GK 1, 2 LVN Inch size J type K type LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 17-5-136 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL 17-5-96

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

M-E05-1-LQ1

Nut Insert bushing LQ1F41 4 4-12 LQ-4N12 LQ1-4B12 LQ1F42 4 4-10 LQ-4N10 LQ1-4B10 LQ1F51 5 5-19 LQ-5N19 LQ1-5B19 LQ1F52 5 5-12 LQ-5N12 LQ1-5B12 LQ1F61 6 6-25 LQ1-6N25 LQ1-6B25 LQ1F62 6 6-19 LQ1-6N19 LQ1-6B19 Inch size Model Size Insert pin/Name plate symbol Part no.

VXP21/22/23

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Weight: 3.9 g Weight: 4.6 g 198 A Miniature Fittings M Series M5 Series Bulkhead Reducer: M-5ER Manifold: M-5M M12 x 0.75 9 x M5 x 0.8 M12 x 0.75 M5 x 0.8 Rc 1 8 KQ2 Mounting hole 2 x 5.5 Width across flats 14 Width across flats 17 KQB2 Width across flats 14 Mounting plate thickness 3.5 max.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VNC

14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208 148 148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 55 55 60.5 73 LVA LVH LVD Threaded Type Port size: 32A, 40A, 50A LVQ Electrical entry hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port

VXF

If longer than the length in the diagram, the valve might not open due to the tube resistance. 6 x 10 pcs. 6 x 10 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 12 pcs. 6 x 12 pcs. 6 x 12 pcs. 6 x 12 pcs. 500 mm 500 mm 500 mm Data (C) Start-up Speed 2,000 mm 2,000 mm mm Without tube (VXF2160) Without tube Without tube (VXF2160) Inlet pressure: 0.7 MPa Inlet pressure: 0.7 MPa Inlet

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

VNB

LVH VNB1 VNB12 1 4 12 (P1) 12 (P1) LVD External pilot solenoid Valve Specifications LVQ Fluid Water/Oil/Air/Vacuum, etc. 5 to 60C (1) 2 (B) 1 (A) 2 (B) 1 (A) VNBA Fluid temperature LQ 5 to 99C (1) (Water, Oil etc.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

VCW

LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-2-51 4 For details about certified products conforming to international standards, visit us at www.smcworld.com.

S Couplers

LQ KKA3S-P01 KKA4S-P01 KKA6S-P01 KKA7S-P01 KKA8S-P01 KKA9S-P01 MQR Socket Plug O-ring T IDK 345 KKA Series Dimensions/Plug (P) With check valve Male thread type (mm) Body size H Width across flats T Connection port size Weight g Effective area mm2 L1 Min. bore size A Model L2 KKA3P-01M R 1/8 15.4 31.4 35.4 14 -02M 1/8 R 1/4 16.0 5.6 17.4 19.8 32.4 38.4 -03M R 3/8 32.9 32.9 39.4 KKA4P-02M

VXA31/32

Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

pa

LVD PAX1000, PA3000, PA5000 LVQ Proper tightening torque (Nm) Connection threads Rc 1/4 12 to 14 LQ Rc 3/8 22 to 24 LVN Rc 1/2 28 to 30 Rc 3/4 28 to 30 TI/ TIL 3. Ensure space for maintenance. When installing and mounting, be sure to allow the space required for maintenance and inspections. Confirm the necessary maintenance space in the instruction manual for each piece of equipment.

Clean Regulator/Fluororesin Type

Insert bushing Insert bushing LQ-2B07 Nut LQ-2B03 Nut LQ-2N07 LQ-2N03 Tubing Collar Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) How to order fitting parts Tubing LQ 2 U 03 Type U is recommended when changing the tubing size. Tubing size Symbol Tubing O.D.

VDW

LVN Types 10, 20 Stainless steel VVDW 2 0 5A TI/ TIL Series PA 1 2 10 20 PAX PB Type 30 VVCW20-5A 17-2-73 14 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VXD21/22/23

14 41.5 44.5 44.5 ( ): N.O. 17-3-41

VCL

(Value at the initial state) LVD LVQ LQ LVN TI/ TIL Characteristic Specifications PA (2) (1) (1) N.C.