Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specification: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series], Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 30 to 3000 l/min, Thread Type: NPT, Port Size: 1, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Silencer Series AN

PU-10M-RRD Silencers/Exhaust Cleaner Series AN/Series AMC Series Noise reduction Nominal filtration rating (Reference values) Oil mist removal ratio Standard type Low back pressure Compact and easy mounting Series AN00 100 m 150 m Page 5-10-2 30 dB (A) Compact type Space-saving compact type Series AN03 100 m 25 dB (A) Page 5-10-3 Metal case type Exhaust in only one direction.

Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

N LVH LQ2H2A-M LQ2H2B-M LQ2H2C-M LQ2H2D-M LQ2H2E-M LQ2H2F-M LQ2H3A-M LQ2H3B-M LQ2H3C-M LQ2H3D-M LQ2H4A-M LQ2H4B-M LQ2H4C-M LQ2H4D-M LQ2H5A-M LQ2H5B-M LQ2H5C-M LQ2H5D-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 39 LVD 42.5 19.9 16 19 18 LVQ 1/4" 36.5 LQ 43 42.5 42.5 42 53 52 51 50 60.5 59.5 58.5 57.5 49 48.5 49 48.5 59 58 59 58 68 67

High Purity Fluoropolymer

Reducing type Reducing insert bushing 4 Series LQ1 Dimensions Male Connector: LQ1H-M Metric sizes M Connection threads R/NPT Model L H A M W E Applicable tubing O.D. 1/8 LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6

LVQ

T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.

Prevents Micro-Bubbles

Description Bracket assembly LQ-GBL J type K type L type M type (for short piping) 34 Series LV High Purity Chemical Valve Special Tools Dimensions LQ-GJ LQ-GK VC VDW LQ-GJ 36 30 VQ 45 (adjustable) VX2 117 76 24 LQ-GK 36 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

KQ2

Note) D1: Max. diameter MS LQ Branch Universal Male Elbow: KQ2Z MQR H (width across flats) Connection thread R M Effective area (mm2) Applicable Note) Mass (g) A 2 x applicable tubing D1 D2 L1 P L2 L3 M tubing O.D.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55

Fluoropolymer Tubing Variations

Metric 1/8" to 1" 1/8" to 1/2" 1/8" to 3/4" 1/8" to 1 1/4" Inch Translucent, Red, Blue, Black Translucent, Red, Blue, Black Translucent Translucent Color KQ2, KQG2, KP, KP KQ2, KQG2, KP, KP One-touch fittings Applicable fitting series M, MS (Hose nipple type) M, MS (Hose nipple type) M, MS (Hose nipple type) Miniature fittings KF, KFG2 KF, KFG2 KF, KFG2 Insert fittings LQ series LQ series

M-E05-1-LQ1

LQ GPM Insert pin set (with the parts case) Insert pin Nil Metric size N Inch size Body class Metric size Inch size 1, 2 03 (3) 03 (1/8") 5, 6 19 (19) 19 (3/4") 6 25 (25) 25 (1") LQ GP M 2 07 Insert pin (single) Body class (Refer to Table 1) Tubing size symbol (Refer to Table 1) How to Order/Type J, K Handy type LQ G J Insert pin material Insert pin/Holder type Nil Resin Nil Metric size N