Flow Range: 0 (PF2A510: 1-10l/min, PF2A550: 5-50l/min), Output Specification: 0 (NPN Open Collector 2 Outputs)

Flow Range: 0 (PF2A510: 1-10l/min, PF2A550: 5-50l/min), Output Specification: 1 (PNP Open Collector 2 Outputs)

Flow Range: 0 (PF2A510: 1-10l/min, PF2A550: 5-50l/min), Output Specification: 1 (PNP Open Collector 2 Outputs), Unit: M (S1 Fixed Unit)

Flow Range: PF2A510: 1-10l/min, PF2A550: 5-50l/min, Output Specification: NPN Open Collector 2 Outputs, Unit: S1 Fixed Unit

Flow Range: PF2A510: 1-10l/min, PF2A550: 5-50l/min, Output Specification: NPN Open Collector 2 Outputs, Unit: -

Flow Range: PF2A510: 1-10l/min, PF2A550: 5-50l/min, Output Specification: PNP Open Collector 2 Outputs, Unit: -

Flow Range: PF2A510: 1-10l/min, PF2A550: 5-50l/min, Output Specification: PNP Open Collector 2 Outputs, Unit: S1 Fixed Unit

V100

actuation Port size {2(A) port} (A) 2 N.C.

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Flow Range: 50 (5~50 l/min), Thread: Rc, Port Size: 01 (Port Size 1/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 5~50 l/min, Thread: Rc, Port Size: Port Size 1/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Compact Vacuum Unit

Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Electro-Pneumatic Proportional Valve

PVQ13-L PVQ33 PVQ31 27 30 35 22 27 12 10 20.5 =60.6 5 49 24.7 12 2-1/8" 25 * Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 2 Stations, A, B Port: 01N (NPT1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: 01N (NPT 1/8)