Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

VFR

Stations Stations L L1 L2 L3 (MP) L3 (AP) Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L3 = 28 x n + 194 L3 = 28 x n + 235.5 3 131 140 278 319.5 4 159 168 306 347.5 5 187 196 334 375.5 6 215 224 362 403.5 7 243 252 390 431.5 8 271 280 418 459.5 9 299 308 446 487.5 10 327 336 474 515.5 6-Rc 1/4 (P , EA, EB port) 3-5-26 27 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

VZM400

(Total Travel) 40 Hexagon nut thick 5, across flats 17 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2-3.2 mounting hole 15 N F.O.F. 40 T.T. 5-6-44 5 Port Mechanical Valve Series VZM500 Series VZM500 Push button (Mushroom) VZM550-01-30R/B/G/Y Panel mounting hole SA (Pilot exhaust port) JIS symbol VA SA VA VM 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

IR1000/2000/3000

VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.

VR4151/4152

G F01 1 8 0 Construction Open type Splashproof (IP44 equivalent) 1 Piping Warning Construction When connecting a pipe fitting to the IN port, place the wrench over the hexagon portion of the lid. If the wrench is placed over the microswitch body, the neck of the microswitch could break. Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No.

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

PB series process pumps with a built-in solenoid valve (PB1011A) are equipped with a solenoid valve inside. Simply energizing this solenoid valve does not drive the pump.
When the solenoid valve is turned ON/OFF, the diaphragm operates, and the fluid is sucked in and discharged alternately.

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

I -,zr n r y'~[ ~ ~I~@ ~ u Ll L4JE ItAII co ... ,,!

E-ITV-STD-RF-A

Fl ow of t he set t i ng PO W ER O N REFER TO P8 U N LO CK KEYS REFER TO P911 REFER TO P8 REFER TO P11 REFER TO P1316 LO CK KEYS RESET SETTI N G O F PRESET PRESS. D ETAI L SETTI N G SETTI N G O F M I N . PRESS. G AI N SETTI N G O F M AX. PRESS. SEN SI TI VI TY SETTI N G O F SW I TCH O U T.

Vacuum

(zx1A) N,O. N,C. (NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!

Vacuum

(zx1A) N,O. N,C. (NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

Vacuum System Peripherals:

D 6 N ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate ejector/valve, etc for X. (When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

(Page 11) 0x000C (12) 0 R/W Device Access Locks N 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N AMS-ITV 0x0013 (19) 0 R Product ID N AMS-IL 0x0014 (20) 0 R Product Text N AMS-ITV 0x0015 (21) 0 R Serial Number N "x" *3 0x0016 (22) 0 R Hardware Revision N HW-Vx.y *4 0x0017 (23) 0 R Software Revision N FW-Vx.y *4 "

IO-Link/ELECTRO-PNEUMATIC REGULATOR

(Page 14) 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N ITV-IL 0x0013 (19) 0 R Product ID N ITV-IL 0x0014 (20) 0 R Product Text N IO-Link/Electro Pneumatic Regulator 0x0015 (21) 0 R Serial Number N "x" *3 0x0016 (22) 0 R Hardware Revision N HW-Vx.y *4 0x0017 (23) 0 R Software Revision N FW-Vx.y *4 0x0018 (24) 0