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(6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

alloy Electropolish Ni-Cr-Fe alloy 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Co alloy Ni-Cr-Mo alloy PCTFE 316L SS PCTFE (Option: Polyimide) Dimensions inch (mm) AP3125 2.05 (51.8) 1.48 (37.3) 0.94 (23.9) 0.715 (18.2) 3.86 (98.0) A A AP3150 Indicator switch AP3157 1.87 (47.5) AP3150 1.88 (47.8) AP3100 2.12 (53.8) Indicator switch (Option) AP3157 4.46 (113.3) AP3150

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

of bottom positioning pin hole Position of bottom positioning pin hole Symmetric type For 180 For 90 Positioning pin hole Positioning pin hole 3 Counter-clockwise 3 B port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s u 3 i ni w n k im C c ra l o Mi 6 3 8 n ax o 1 ti ta M ro e m g u m ni n Mi e ra 180 C s l i o

NI = Carbon Steel with Electroless Nickel Plating* S3 = 303 Stainless Steel Passivated* S6 = 316 Stainless Steel Electropolished* Seal Code: Blank = Nitrile A = Aflas* W = Ethylene Propylene Y = Fluorocarbon Z = Neoprene For Perfluoroelastomer Seal Option Contact the Division.

O nl y personnel w i t h appropri at e t rai ni ng shoul d operat e m achi nery and equi pm ent . Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors.

O nl y personnel w i t h appropri at e t rai ni ng shoul d operat e m achi nery and equi pm ent . Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors.

Minimal contamination from heavy metals The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and its low sputtering yield also helps to minimize the heavy metal contamination of semiconductor wafers. Sensor New New A heat-resistant 2-color indicator solid state auto switch is available for models with a heater.

I Width across ~ flats 14 3 I I ~t~l ~across M5XO.8 ..., WIdth across flats 7 M4XO .5 ', . ~ Width a CfOSS ~X08 1~ I ~I flats 8 , ~ h NI 1\Wld!h 8C' O$5 I 1 2 . 5' '!i rj 0] o !W j j 1l flats 12 / IE Adaplor plate i!1 ~~~ Flat with rib T ~ . ~ Deep type/ zpnOD'16D only l..!.

Then the extract was diluted with super deionized water to be subjected to a quantitative analysis on Al, Fe, Ni, Na and Ca by the stripping method. Please refer to the Series and Specifications above, as the tubing length differs depending on each size.

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

Please refer to page 1114. 2 ports Wetted Parts Material Specifications Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted Parts Body Surface finish Diaphragm Seat S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 AZ3542 Normally closed (N.C.)

Material: S (Body: 316L SS Secondary Remelt; Poppet: Ni-Cr-Mo Alloy; Diaphragm: Ni-Cr-Mo Alloy; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/

Material: S (Body: 316 SS; Poppet: Ni-Cr-Mo Alloy; Diaphragm: Ni-Cr-Mo Alloy; Nozzle: 316 SS), Ports: 3P, Connections, Inlet: 8 (NPT 1/2 inch), Connections, Outlet: 8 (NPT 1/2 inch), Gauge Port, Extra Bottom Outlet: 2 [0 to 200 psig (0 to 1.4 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH