Series AK1000

200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 0.41 60 45 0.31 0.34 50 0.28

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Series AP3100

alloy Electropolish Ni-Cr-Fe alloy 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Co alloy Ni-Cr-Mo alloy PCTFE 316L SS PCTFE (Option: Polyimide) Dimensions inch (mm) AP3125 2.05 (51.8) 1.48 (37.3) 0.94 (23.9) 0.715 (18.2) 3.86 (98.0) A A AP3150 Indicator switch AP3157 1.87 (47.5) AP3150 1.88 (47.8) AP3100 2.12 (53.8) Indicator switch (Option) AP3157 4.46 (113.3) AP3150

Profi-E

S. f or t arget val ue i s 12bi t , com m uni cat i on i s avai l abl e up t o 150% F. S. ( accuracy i s guarant eed up t o 100% F. S. ) . O ver range error i s out put w hen 150% F. S. i s exceeded.

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siz~ ,t~ , ~8 , ' 0"32 jS4C ~ OQ . 50 150 "'2O or more:Special order ~ i ListO Pad DI. -Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

7ND9071en

ND9200, ND9300 Table 15 Ambient temperatures, ND9_U Variant type NI Class I, Division 2, Groups A, B, C, D, T4...T6 NI Class I, Zone 2, Ex nA IIC T4...T6 Ambient temperature ranges T6 T5 T4 ND9_U_ -40 to +50 C -40 to +65 C -40 to +80 C ND9_U/D44 ND9_U/I02 ND9_U/I09 ND9_U/I45 Pending Table 16 Ambient temperatures, ND9_E2 (ND9_E4, only T6) Variant type Ex d IIC T4T6, AEx d IIC T4T6 Ex tb IIIC

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lo switches Bore sizel E--6,"'"-l IE ro.m I IE re '. 1 Port location on head cover stroke (l00ihs o Standard 50, 100, 150,200 50, 100, 150, 200, 300.400, 500,600 50, 100, 150. 200,300,400, 500,600,700,400 Doub e actino Sinole aclino sorinq relurn Sinale aclinq sprinq extend Se Caralog N301 ior slandard stroke Lenglhs on lypes otherrhan single rod 'lnrermedate shkes can b nanufacrured upon

MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

VCC

Operating fluid Eliminate all solid material larger than 150 m in the fluid to avoid valve failure. Piping Caution 1. Piping to pilot port Condensation may be formed in the piping to the pilot port, due to factors such as its length. The life of the valve will be shortened if condensed moisture enters the pilot port.

Pressure Gauge Guide

4 1 R MPa, psi Oil-free 4 1 R M5 (Female thread) MPa Oil-free, With cover ring assembly Plated stem (Ni) 4 1 R Note) Do not apply pressure more than the maximum display pressure.

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

Hydraulic

D-A59W 20 115 115 125 130 140 150 Same side 1 pc. 15 10 Different sides 2 pcs. D-F5, D-J5 10 115 115 120 130 140 150 Same side 1 pc. 10 10 Different sides D-F5W, D-J5W D-F5BAL 2 pcs. 10 120 120 120 135 140 150 Same side 1 pc. 10 10 Different sides 2 pcs.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Magnetically Coupled Rodless Cylinder

, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

SMC Basic Pneumatics

This ligure has to be multiplid by 150, tor 5 times 100 mm stroke and 30 times per minute: 150/min .3.021 liters = 453.15 l/min. P T I E U A T I C T E C H N O L O G Y horanv ACTUATORS R A C K A N D P I N I O N T Y P E The output shatt has an integral pinion gear driven by a rack anached to a double piston. Standard angles of rotation are 90" or '180'.

%silltr

This ligure has to be multiplid by 150, tor 5 times 100 mm stroke and 30 times per minute: 150/min .3.021 liters = 453.15 l/min. P T I E U A T I C T E C H N O L O G Y horanv ACTUATORS R A C K A N D P I N I O N T Y P E The output shatt has an integral pinion gear driven by a rack anached to a double piston. Standard angles of rotation are 90" or '180'.