High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Air Cylinder

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with p are produced upon receipt of order.

58

or less 1200 or less 1600 or less 160 Made of stainless steel (With hard chrome plated piston rod) -XC68 Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with autoswitch, please refer to pages 21 to 24.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Basic type / Direct mount type Series CY3B/CY3R

A96V A96 5 V 12 V IC circuit Yes D24 V Grommet Relay, PLC A93V A90V A93 A90 100 V 2-wire No IC circuit 100 V or less -X Solid state auto switches marked with a symbol are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

CY1F

Applicable load IC circuit, Relay, PLC Load voltage 24V or less 48V or less 100V or less AC DC AC DC AC DC Maximum load current 50mA 40mA 20mA Contact protection circuit None Internal resistance D-A93, D-A93V, D-A96, D-A96V (with indicator light) 1 or less (including 3m lead wire length) D-A93, D-A93V D-A96, D-A96V Auto switch part no.

Air Cylinder

1/4 3/8 3/8 1/2 1/2 30 30 40 45 50 64 76 92 84 90 98 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 601 to 1200 601 to 1200 751 to 1400 751 to 1500 112 136 116 126 100 14 Note 1) Operating temperature range of model with built-in magnet: 10 oC to 60 oC Note 2) For model with built-in magnet, consider the minimum stroke suitable to install the auto switches.

Cylinder with Lock

88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29 180 100 220 89 12 50 136 347 80 21 81 339 1/4 stroke 65 1001 to 1500 When machining a hole to put a bellows

CLS

Mounted directly to unlocking port Maximum value from range of 100 measured stopping positions 1600 or less 1000 or less 1000 or less 125, 140 1600 or less 1200 or less 1200 or less 160 2000 or less 1200 or less 180 Class 2 Pressure Vessel 2000 or less 1200 or less 200 A class 2 pressure vessel will be required for strokes exceeding those shown below. 2400 or less 1200 or less 250 Cylinder

High Power Cylinder Series RHC

D-A93 Less than 50 strokes MQ D-M9 D-M9W Less than 20 strokes Less than 55 strokes RHC RZQ D-X Individual -X 1211 Series RHC Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Reed auto switch Solid state auto switch D-A9 D-M9 D-M9W 20 to 40 20 to 40 ( ): For D-A93 type Hs Hs 8.5 16.5 16.5 8.5 B A B A 22 22 (24.5) Auto switch Auto switch 50 to 63 50

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

e

1600 2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light Load (19.60 m/s2) 4.0 4.0 E-MY E-MY 300 mm/s 300 mm/s 3.5 3.5 400 400 3.0 3.0 500 500 600 600 2.5 2.5 800 800 Tact time (sec) Tact time (sec) 1000 1000 2.0 2.0 1.5 1.5 1.0 1.0 1600 2000 1600 2000 1200 1200 0.5 0.5 0 0 500 1000 1000 0 0 500 Stroke (

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-15-44 for details.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

CY1

Applicable models: D-A73, A73H, A73C, Z73, D-A93 1) If connections are reversed on a 2 wire type switch, the switch will not be damaged if protected by a protection circuit, but the switch will always stay in an ON state.