High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

Electric Actuator

Weight [g] Precautions Caution D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 0.5 8 8 7 Fix the auto switch with the existing screw installed on the auto switch body.

Air Cylinder Series CS1

30 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 19 106 206 9 M16 x 1.5 Up to 1200 30 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41 24 125 231 10 M18 x 1.5 Up to 1200 30 to 1200 Lube Non-lube 63 60 226 182 50 115 74 48 17 18.5 20 46 24 132 231 10 M20 x 1.5 Up to 1200 30 to 1200 71 67 277 225 60 140 86 60 20 23 25 56 29 160 301 12 M24 x 1.5 Up to 1200 30 to 1200 80 76 330 270 70 140

Smooth Cylinder/Low Speed Cylinder

or less 1200 or less 1600 or less Made of stainless steel (With hard chrome plated piston rod) -XC68 RZQ Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with auto switch, please refer to pages 1238 to 1240.

Made to Order

1200 Specifications XC6 Standard model no.

Mechanically Jointed Rodless Cylinder Series MY1

) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

Cylinder with Lock Series CLS

98 5 30 345 75 40 133 368 98 345 368 Up to 1200 30 to 1200 0.2 stroke 9 3/4 106 5 30 388.5 409.5 75 40 141 409.5 106 388.5 Up to 1200 30 to 1200 0.2 stroke 3/4 111 448 85 45 153 466 115 452 470 Up to 998 30 to 1200 0.2 stroke 3/4 111 468 90 45 153 486 120 477 495 30 to 1200 0.17 stroke 1 141 579.5 105 55 176 595.5 790 Double Acting, Single Rod Series CLS Cylinder with Lock Axial foot type

MY1

Support brackets are not for mounting; use them solely for providing support. m 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1C25 MY1C25 MY1C25 MY1C25

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

58

or less 1200 or less 1600 or less 160 Made of stainless steel (With hard chrome plated piston rod) -XC68 Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with autoswitch, please refer to pages 21 to 24.

CLS

(Up to 1200) 180 Up to 1500 (Up to 2000) Up to 1200 (Up to 1200) 200 Up to 998 (Up to 2000) Up to 998 (Up to 1200) Holding Force of Spring Locking (Maximum static load) 250 (Up to 2400) (Up to 1200) Auto switches are not available with steel tube.

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load Applicable bore size Indicator light Type Special function Electrical entry Wiring (Output) DC AC 20 to 63 80, 100 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line In-line M9NV M9N IC circuit 3-wire (NPN) G59 5 V, 12 V 3-wire (PNP) M9PV M9P G5P Grommet 2-wire 12 V M9BV M9B K59 Connector H7C

Air Cylinder

1/4 3/8 3/8 1/2 1/2 30 30 40 45 50 64 76 92 84 90 98 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 601 to 1200 601 to 1200 751 to 1400 751 to 1500 112 136 116 126 100 14 Note 1) Operating temperature range of model with built-in magnet: 10 oC to 60 oC Note 2) For model with built-in magnet, consider the minimum stroke suitable to install the auto switches.

Cylinder with Lock

88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29 180 100 220 89 12 50 136 347 80 21 81 339 1/4 stroke 65 1001 to 1500 When machining a hole to put a bellows

Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

CLS

Mounted directly to unlocking port Maximum value from range of 100 measured stopping positions 1600 or less 1000 or less 1000 or less 125, 140 1600 or less 1200 or less 1200 or less 160 2000 or less 1200 or less 180 Class 2 Pressure Vessel 2000 or less 1200 or less 200 A class 2 pressure vessel will be required for strokes exceeding those shown below. 2400 or less 1200 or less 250 Cylinder