Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Note 1) Weight (g) 10 20 30 50 70 100 200 Size With adjustment bolt 530 990 1290 2080 2880 4090 7580 Basic type With internal shock absorber 540 990 1290 2100 2890 4100 7650 With adjustment bolt 560 1090 1410 2240 High precision type With internal shock absorber 570 1090 1410 2260 Note) Values above do not include auto switch weights. 11-9-17 18 Series MSQ Rotation Direction and Rotation

Magnet: D (Built-in), Mounting: B (Basic), Cushion: N (Rubber Bumper), Bore Size: 63 (2 1/2"), Stroke: 2100 (21"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Rotary Cylinder Series MRQ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-90A/D-93A Direct Mounting Style . D-R73/D-R80 Direct Mounting Style. D-R73xC/D-R80xC Direct Mounting Style . 2-color Indication Type Reed Switch . D-A79W Rail Mounting Style . D-A59W Tie-rod Mounting Style . Solid State Switch. General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

Magnet: D (Built-in), Mounting: F (Front Flange), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 2100 (21"), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Magnet: Built-in, Mounting: Front Flange, Cushion: Rubber Bumper, Bore Size: 1 1/2", Stroke: 21", Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Magnet: Built-in, Mounting: Front Flange, Cushion: Rubber Bumper, Bore Size: 1 1/2", Stroke: 21", Auto Switch: G59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

PFxx-OMY0005

(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.

PFxx-OMA1007

[F14] Zero cut-off setting is completed -94No.PF-OMA1007-B Displayable flow rate range Displayable flow range Zero cut-off Zero cut-off set range AMS20 AMS30 AMS40 AMS60 0.0 0%F.S. 0 to 525 L/min 0 to 1050 L/min 0 to 2100 L/min 0 to 4200 L/min 40 to 4200 L/min 20 to 2100 L/min 10 to 1050 L/min 5 to 525 L/min (Displays 0 when the value is below 40 L/min) (Displays 0 when the value is below

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

.+20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0 to -2100 -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and

Fieldbus system EtherNet/IP compatible SI Unit

.+20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0 to -2100 -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and

Fieldbus system EtherNet/IP TM compatible SI Unit

.+20 mA 0 to 2100 32768 to 34868 0 to 2100 -0 to -2100 +0.00 to +21.00 mA -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and

Fieldbus system EtherCAT compatible SI Unit

.+5 V N/A N/A -0.00 to -5.25 V Web -0 to -525 CoE/Web 0 to 2100 +0.00 to +21.00 mA CoE 32768 to 34868 -20..+20 mA -0.00 to -21.00 mA Web -0 to -2100 0..10 V CoE/Web 0 to 1050 +0.00 to +10.50 V 01024 +0.00 to +10.24 V 0..5 V CoE/Web 0 to 525 +0.00 to +5.25 V 0509 +0.00 to +5.09 V 1..5 V CoE/Web 75 to 525 +0.75 to +5.25 V 75509 +0.75 to +5.09 V 0..20 mA CoE/Web 0 to 2100 +0.00 to +21.00 mA

Fieldbus system Ethernet POWERLINK compatible SI unit

+20.90 mA 300 to 2090 +3.10 to +21.00 mA 310 to 2100 43 EX## OMS1015-A 8.

Fieldbus system PROFINET compatible SI Unit

.+20 mA 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0.00 to -21.00 mA 0..10 V 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by GSDML file.

EXxx-OMQ0016

.+20 mA 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0.00 to -21.00 mA 0..10 V 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 +3.00 to +21.00 mA : Follow the methods below when assigning the user set upper and lower limit by PLC.

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PF2MC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PFMC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

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Unit Note 9) Instantaneous flow L/min, cfm (ft3/min) Accumulated flow L, ft3 Displayable range Instantaneous flow 25 to 525 L/min (Displays [0] when value is within 4 to 4 L/min range.) 50 to 1050 L/min (Displays [0] when value is within 9 to 9 L/min range.) 100 to 2100 L/min (Displays [0] when value is within 19 to 19 L/min range.)