EXxx-OMN0029CN

Clear BOOL 0Switch 1Handheld or DeviceNet TM Object -67No.EX-OMN0029CN-D Digital Input Unit (Class6Ah)[DeviceNet TM1] Instance Attribute Access Name Type Value 70h Get/Set Monitoring short circuit at Power supply BOOL 0Disable 1Enable 78h Get/Set Inrush current detection BOOL 0Disable 1Enable 00.1 ms 11.0 ms 210 ms 320 ms 01h40h A4h Get/Set Input filtering time USINT 01.0 ms 115 ms 2100 ms 3200

Digital Pressure Switch ( compatible)

0x0258 ~ 0x1450 ZSE20BF: 0x1068 (600 ~ 5200) (4200) ZSE20BF: 0x0384 ~ 0x13EC (900 ~ 5100) Setting of OUT1 hysteresis (window comparator hysteresis) Setting range ISE20B: 0x03E8 ~ 0x0CEE WH1 (Setting of OUT1 hysteresis _Window comparator hysteresis) ISE20B: 0x0578 (1400) 0x03F8 (1016) 0 R/W ZSE20B: 0x0578 Y U16 (1000 ~ 3310) (1400) ZSE20B: 0x03E8 ~ 0x0CE4 ZSE20BF: 0x0C80 (1000 ~ 3300) (3200

KT10

MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200 psig (8.2 MPa) 2250 psig (15.5 MPa) 3750 psig (25.8 MPa) 6000 psig (41.4 MPa) 9000 psig (62.1 MPa) 15000 psig (103 MPa) 2000 psig (13.8 MPa) 3200

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) 120 m l Weight m 110 MY1B100 Caution 100 m 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

MY1

(kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Table of Contents

(kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

EXxx-OMS0026CN

Name Type Value 0 1 Bit0 Bit1 Bit2 Bit3 Bit4ON/OFF Bit5 Bit6() Bit7(/) 01h0Ah 64h83h 2 Get Ch031 BYTE 1 101h0Ah 09 264h83h 031 -73No.EX-OMS0026CN (Class:78h) Instance Attribute Access Name Type Value () BOOL 0 1 64h / // () BOOL 0 1 65h SI / 66h / BOOL 0 1 67h / BOOL 0 1 68h / BOOL 0 1 BOOL 0 1 69h SI / 00.1 ms 11 ms 210 ms 320 ms 01h0Ah Get/Set 6Ah 1 / USINT 01 ms 115 ms 2100 ms 3200

Digital Flow Switch ( compatible)

0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2MC7 series, unit L/min, flow range 1000 L and PD = 2500) Pr = a (PD) + b = 0.25 2500 + 0 = 625 [L/min] (2) Conversion from the flow measurement value to the process data (For PF2MC7 series, unit L/min, flow range 1000 L and Pr = 800 [L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200

Digital Flow Switch ( compatible)

0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PFMC7 series, unit L/min, flow range 1000 L and PD = 2500) Pr = a (PD) + b = 0.25 2500 + 0 = 625 [L/min] (2) Conversion from the flow measurement value to the process data (For PFMC7 series, unit L/min, flow range 1000 L and Pr = 800 [L/min]) (PD) = (Pr b) / a = [800 0] / 0.25 = 3200

HRX-OM-R016

Air-Cooled refrigerated type Water-Cooled refrigerated type Refrigerant R407C(HFC) Quantity of refrigerant kg 0.57 0.5 Control method PID control Ambient temperature and humidity2 Temperature: 5 to 40oC Humidity: 30 to 70% Circulating fluid3 Tap water, Ethylene glycol aqueous solution 15%5 Operating temperature oC 5 to 40 range2 Circulating fluid system Cooling capacity4 (50/60Hz) W 2600/3200

A_HEC-OM-K001

.: 25oC 1) Cooling capacity 1600 1400 Facility water 10oC Facility water 25oC 1200 Cooling capacity W 1000 Facility water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

60S-1 XL1A25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

IDX-OM-W037

Operation/ Shutdown 3.10.6 PID manual setting CH1 PID (control parameter) P Proportion band (050) i Integral time (051) d Derivative time (052) PID(proportion band / integral time / derivative time) is manually set. [ Setting range] P: 0.1 to 999.9 I: 0 to 3200 sec. D: 0.0 to 999.9 sec. PID values are automatically set by auto tuning.

AC Servo Motor Driver (Pulse input type/Positioning type ）

motor HF-MP HF-KP 1) or LE-CSE-SB LE-CSE-RB MR-J3ENCBL M-A2-L MR-J3ENCBL M-A2-H 2) Servo Motor LE-Servo motor HF-MP HF-KP CN2 1) Cable model 1) For CN2 connector 2) For encoder connector Connector set: 54599-1019(Molex) Connector: 1674320-1 Crimping tool for ground clip: 1596970-1 Crimping tool for receptacle contact: 1596847-1 (Tyco Electronics) Receptacle: 36210-0100PL Shell kit: 36310-3200

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AK ASS ASR ASF 15-9-25 3 Series AS Construction: AS1400-M3 Construction: AS1200-M3, AS120-M5, AS220/320/420 AS2200, 3200, 4200 Meter-out type AS1200-M3, M5, U10/32 Component Parts No.

Table of Contents

AK ASS ASR ASF 15-9-25 3 Series AS Construction: AS1400-M3 Construction: AS1200-M3, AS120-M5, AS220/320/420 AS2200, 3200, 4200 Meter-out type AS1200-M3, M5, U10/32 Component Parts No.