SL5200

Vespel is a registered trademark of DuPont. 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 25 Single Stage Regulator for Ultra High Purity Low flow Series SL5500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option

Vacuum System Peripherals:

Flow capacity (l/min (ANR)) Oil mist concentration at outlet side 300 750 1500 2200 3500 Filtration (m) Port size Rc Model AM150 AM250 AM350 AM450 AM550 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) , , , , , , , , , 1 1 0.3 1 2 3 4 3 4 1, 1 2 1 , 2 AM650 6000 AM850 12000 1 2 Can produce with auto drain type, drain piping type.

AK1000

Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

AP64

4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch tube weld No code M X MV4 FV4 TW4 MV6 FV6 TW6 Specifications Operating Parameters Gas Inlet pressure Cracking pressure 1) Maximum backpressure Proof pressure Burst pressure Ambient and operating temperature Cv AP64 Select compatible materials of construction for the gas Vacuum to 3500

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with

Information

3000 2500 2000 1500 1000 500 0 3500 3000 2500 2000 1500 1000 500 0 Cooling capacity [W] Cooling capacity [W] 25C 25C 32C 32C 40C 40C Ambient temperature or facility water temperature Ambient temperature or facility water temperature [50 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS050-A-20 8000 7000 6000 5000 4000 3000

Electric Actuator/Slider Type

LEY63 T8 (Motor mounting position: Top/Parallel, In-line) 787 [3500] 674 [3000] Lead 2.86: LEY63 L (Top/Parallel only) 562 [2500] Force lbf [N] Lead 5: LEY63 C 450 [2000] 337 [1500] Lead 10: LEY63 B 225 [1000] 112 [500] Lead 20: LEY63 A 0 10 12 20 30 40 50 Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 20 or less 100 100 (60)

Ionizer

Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500 1900, 2300 661 A Series IZS31 Dimensions Feedback sensor/IZS31-DF Amplifier part Head part 2 x 3.4 2 x 3.4 3500 1500 16.6 13 SMC 9 58 25 4.8 10.2 69 15 4.8 23 8 87.5 78 0.5 11 13 6.5 7.8 8.8 8.8 0.5 10.2 10.2 13 60 7.7 7 6 1 50.5 14 Detection hole 10 61 2 x R3.3 Autobalance sensor [High-precision type]/IZS31-DG Amplifier part Head part 2

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

KT10

series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve Seat, vent valve O ring Rings, back up Dimensions Flow Characteristics inch (mm) KT10 2.25 (57.2) KT10 6000 psig (41.4 MPa) inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500

EXxx-OMY0004

Withstand voltage 500 VAC for 1 min. between FE and all accessible terminals to IEC 61131-2 Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation: 80 kPa to 108 kPa (under 2000 m) Storage: 66 kPa to 108 kPa (under 3500 m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration

EXxx-OMY0006CN

Table 4-1 EX245 24 V DC +20% -15% 1ms IP65 () (IEC60529) 10M -FE 500VAC IEC61131-2 500VAC1 -FE IEC61131-2 -10 to 50 -20 to 60 35%85% RH 80 kPa 108 kPa ( 2000 m ) 66 kPa 108 kPa ( 3500 m ) 10 Hz to 57 Hz 0.75 mm 57 Hz to 150 Hz 49 m/s 2 XYZ 2 XYZ 3 EN 60068-2-27/29 EMC , 2014/30/EU, IEC61326-3-1 , 2006/42/EC, EN 62061, EN ISO 13849 TUV , EN 61508, EN 62061, EN ISO 13849

PFxx-OMX0002

0.106 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF3A703H series, unit L/min, flow range 3000 L and PD = 2800) Pr = a (PD) + b = 0.75 2800 + 0 = 2100 [L/min] (2) Conversion from the flow measurement value to the process data (For PF3A706H series, unit L/min, flow range 6000 L and Pr = 5250 [L/min]) (PD) = (Pr b) / a = [5250 0] / 1.50 = 3500

PFxx-OMX0007

0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF3A701H series, unit L/min, flow range 1000 L and PD = 2800) Pr = a (PD) + b = 0.25 2800 + 0 = 700 [L/min] (2) Conversion from the flow measurement value to the process data (For PF3A702H series, unit L/min, flow range 2000 L and Pr = 1750 [L/min]) (PD) = (Pr b) / a = [1750 0] / 0.50 = 3500

PFxx-OMY0005

L Ft3 1 0 [Calculation example] (1) Conversion from the process data to the flow measured value (For PF3A801H series, unit L/min, flow range 1000 L and PD = 2800) Pr = a (PD) + b = 0.25 2800 + 0 = 700 [L/min] (2) Conversion from the flow measured value to the process data (For PF3A802H series, unit L/min, flow range 2000 L and Pr = 1750 [L/min]) (PD) = (Pr b) / a = [1750 0] / 0.50 = 3500

Table of Contents

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS-3500

Electric Actuators

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS-3500

LJ1H

concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering: TS-3500

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 Rated flow (l/min (ANR)) 750 1500 2200 3500 6000 12000 300 (1) Port size (Nominal size B) 1/8 ,1/4 ,3/8 1/4 ,3/8 ,1/2 3/8 ,1/2 ,3/4 1/2 ,3/4 ,1 3/4 , 1 1, 11/2 11/2 , 2 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.