Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) M9NZ Refer to page 8-28-27 for additional details and applicable auto switches other than the above types.

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40

XL-OMY0002

/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304

JXCx-OMT0023

OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 [Unit: mm] 39.5 34.8 22.4 11.0 9 5 10. CHARACTERISTICS 10.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

AC Servo Motor Driver

OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle: 36210-0100PL Shell kit : 36310-3200-008 [Unit: mm] 39.5 34.8 22.4 11.0 10 5 11. CHARACTERISTICS 11.

AC Servo Motor Driver (CC-Link Type ）

OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 39.5 34.8 22.4 11.0 11 5 12. CHARACTERISTICS 12.

LEC-OM02704CN

D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log 39.0 23.8 5.2 B 12.7 A B C D E F 10126-3000PE 10326-52A0-008 25.8 37.2 14.0 10.0 12.0 31.3 AWG2430 11 4 11 (2) SCR(3M()) 36210-0100PL 36310-3200

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

[Unit: mm] E D A C F Logo etc, are indicated here. 39.0 23.8 5.2 B 12.7 Connector Shell kit Each type of dimension A B C D E F 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 27.4 Applicable wire size: AWG24~30 (3) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 39.5 34.8 22.4 11.0 9 5 10. CHARACTERISTICS 10.

LEC-OM02904

13.4 15 6.7 1.7 1.7 2.3 2.3 9.3 9.3 20.90.2 17.60.2 8 20.90.2 17.60.2 8 (2) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C LOG 39.0 23.8 B 12.7 A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG2430 9 4 9 (b) M2.6 [mm] E D A C F LOG 39.0 23.8 5.2 B 12.7 A B C D E F 10120-3000PE 10320-52A0-008 22.0 33.3 14.0 10.0 12.0 27.4 AWG2430 (3) SCR (3M()) 36210-0100PL 36310-3200

AC Servo Motor Driver (CC-Link Type ）

OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 39.5 34.8 22.4 11.0 11 6 12. CHARACTERISTICS 12.

PSxx-PSV0007

ISE20B : 0x03E80x0CEE 0x0578 (1400) WH1 ZSE20B (Hysteresis value of (10003310) 0x03F8 (1016) 0 R/W OUT1 _ Window U16 0x0578 (1400) ZSE20B : 0x03E80x0CE4 (10003300) ZSE20BF : 0x0BB80x13EC (30005100) comparator hysteresis) ZSE20BF 0x0C80 (3200) dtH1 Setting of OUT1 delay time at ON. 0x0x1770 (06000) 0.01s increments 0x03F9 (1017) 0 R/W U16 0x0 (Delay time when (0) OUT1 is ON) dtL1 Setting

Digital Pressure Switch ( compatible)

0x0384 ~ 0x13EC ISE20CH: 0x0D48 (900 ~ 5100) (3400) ISE20CH: 0x0316 ~ 0x1450 (790 ~ 5200) Setting of OUT1 hysteresis (window comparator hysteresis) Setting range ISE20C: 0x03E8 ~ 0x0CEE ISE20C: 0x0578 WH1 (Setting of OUT1 hysteresis _Window comparator hysteresis) (1400) ZSE20C: 0x0578 (1000 ~ 3310) 0x03F8 (1016) 0 R/W (1400) Y U16 ZSE20C: 0x03E8 ~ 0x0CE4 ZSE20CF: 0x0C80 (1000 ~ 3300) (3200