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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For details, refer to pages 190 to 199.)

Compact

), 2000 50, 100, 150, 200, 250 300, 350, 400, 450, 500 550, 600, 700, 800, 900 1000, (1100), 1200, (1300) (1400), 1500, (1600), (1700) (1800), (1900), 2000 Stroke [mm] Note 1) Work load [kg] Note 2) Horizontal 10 20 Speed [mm/s] Note 2) 48 to 1000 (Refer to Table 1 for set values when LECP1 or 2 is selected.)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1900 1900 1900 1900 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to Minimum Stroke for Auto Switch Mounting on page 72.

Electric Actuator / Low profile slider type

Stroke Standard/Produced upon receipt of order 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 LEMB25 LEMB32 Please consult with SMC as all non-standard and non-made-to-order strokes are produced as special orders.

C92

Bore size (mm) Max. stroke Standard stroke (mm) MB1 32 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 CP95 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C92 100 1900 25, 50, 80, 100, 125,

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate strokes are available.

IZT40/41/42

[mm] Bar length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 4H/4L 4 6H/6L 6 8H/8L 8 AH/AL 10 5H/5L 3/16 7H/7L 1/4 9H/9L 5/16 BH/BL 3/8 : With piping on one side : With piping on both sides : Unrecommended piping Symbol High-voltage cable length [m] 1 1 2 2 3 3 The number of high-voltage cable holders differs depending on the high-voltage cable length.

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 199 A HRSE Series Basic Type How to Order Single-phase 230 VAC HRSE A 018 23 Cooling capacity Option 012 Cooling capacity 1000/1200 W (50/60 Hz) 018 Cooling capacity 1400/1600 W (50/60 Hz) 024 Cooling capacity 1900/2200

Electric Actuator / Slider Type 《 AC Servo Motor 》

(Resolution: 4194304 p/rev) [With LECSC-T] Absolute 18bit encoder (Resolution: 262144 p/rev) specification Type Note 5) No excitation operating type Lock Holding force [N] 27 54 110 Power consumption [W] at 20Note 6) 6.3 7.9 7.9 Rated voltage [VDC] 24 0-10% Product Weight [kg] Model LEFB25 Stroke [mm] 300 400 500 600 700 800 900 1000 (1100) 1200 (1300) (1400) 1500 (1600) (1700) (1800) (1900

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Ionizer IZS40/41/42 Series

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Ionizer Series IZS40/41/42

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Information

earth leakage breaker With automatic water supply function 377 mm Applicable to DI water (deionized water) piping Variations Cooling capacity (W) Cooling method Power supply International standards Model HRS012 Air-cooled refrigeration Water-cooled refrigeration 1100/1300 (50/60 Hz) Single-phase 100 VAC (50/60 Hz), 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) CE/UL HRS018 1700/1900

Multistage Ejector Series ZL112.212

Rc1 25 ZQ Vacuum pressure gauge Exhaust port ZH P With vacuum pressure gauge ZL212-G ZU V ZL ZY Exhaust port Vacuum adapter Rc 1/8 7 ZF With vacuum adapter ZL212-GN P ZP V SP ZCUK Exhaust port Digital pressure switch for vacuum AMJ With digital pressure switch for vacuum ZL212-D P AMV S V AEP (1900) HEP Section A Related Equipment 2 x 4.4 Mounting hole EJECTOR MULTISTAGE 76 52 8 27 178.5

HRX-OM-R039

Air-Cooled refrigerated type Refrigerant R407C(HFC) Quantity of refrigerant kg 0.32 0.33 0.34 Control method Compressor ON/OFF Ambient temperature and humidity1 Temperature: 5 to 40 oC , Humidity: 30 to 70% Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature oC 10 to 30 Circulating fluid system range1 Cooling capacity3(50/60Hz) W 1000/1200 1400/1600 1900

CXT

CXTM (Slide bearing) CXTL (Ball bushing bearing) Max. movable weigh (kg) MXF Allowable static weight (kg) Allowable static weight (kg) Table displacement (mm) Table displacement (mm) Series MXW CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 3 7 12 20 30 50 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 0.015 0.019 0.044 0.180 0.123 0.109 60 70 125 125 140 170 For moving and transporting

AC

Note 4) The use of the straight type cable connector is recommended. 1.12-9 Booster Regulator VBA1110 to 4200 Specifications Model Handle operated style Air operated style VBA1110 VBA200 VBA400 Model Pressure increase ratio MAX. 2 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 VBA2200-03 VBA4200-04 Max. flow l/min (ANR) 400 60 1000 1900 1000 1900 (1) VBA1 MAX. 4 1/2 (IN/OUT) 1/4 (IN/OUT) Connecting

A

ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

Proposals for Energy Saving

1000 1900 VBA1 Maximum 4 1/2 (IN, OUT) 1/4 (IN, OUT) Port size Rc 3/8 (IN, OUT) 3/8 (IN, OUT) 1/2 (IN, OUT) Fluid Compressed air 1/4 Exhaust port size Rc 3/8 1/2 3/8 1/2 VBA1110 VBA1 3.0MPa Pilot port size Rc 1/8 Proof pressure VBA200 VBA400 0.1 to 0.5MPa Pilot pressure range 1.5MPa 3.8 0.85 0.98 7.5 3.8 7.5 Weight kg 1.0MPa Maximum supply pressure 2 1 2 1 Note) Flow conditions IN/OUT: