HRX-OM-I051

/min) 0.45 /0.65 (At 20L/min) (58 / 87 [PSIG] At 5.3[gal/min]) (65 / 94 [PSIG] At 5.3[gal/min]) Main Tank capacity*5 L Approx.12 (3.2 [gal]) Approx.15 (4 [gal]) Sub Tank capacity *6 L Approx.15 (4 [gal]) Approx.16 (4.2 [gal]) Circulating fluid port Rc 3/4 Facility water C/MPa 10 to 25 / 0.3 to 0.7 (45 to 100 [PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 3/4 5/6 9/10 13/14 (0.8

Wedge Cam Operation Provides

MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air tank 41l PA=0.7 MPa A=0.7 MPa Air tank 20l PA=0.7 MPa Air tank 20l PA=0.7 MPa A=0.7 MPa Air tank 41l PA=0.7 MPa Air tank 20l PA=0.7 MPa A=0.7 MPa Air tank 20l PA=0.7 MPa 6 x 6 pcs. Tank 70l 6 x 10 pcs. Pressure 0.7 MPa 10 x 8 pcs.

VXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air tank 41l PA=0.7 MPa A=0.7 MPa Air tank 20l PA=0.7 MPa Air tank 20l PA=0.7 MPa A=0.7 MPa Air tank 41l PA=0.7 MPa Air tank 20l PA=0.7 MPa A=0.7 MPa Air tank 20l PA=0.7 MPa 6 x 6 pcs. Tank 70l 6 x 10 pcs. Pressure 0.7 MPa 10 x 8 pcs.

Hygienic Design Cylinder Series HY

Mounting bolt ZC 109 117.5 132.5 138 ZD 119 129.5 144.5 154 ZE 131 141.5 164.5 170 ZF 141 153.5 176.5 186 HY-C032SUS HY-C040SUS HY-C050SUS HY-C063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L ZE + Stroke ZF + Stroke ZD + Stroke ZC + Stroke Note 1) One mounting bracket is attached with 4 mounting bolts. Note 2) Contact SMC for HYQ 20, 25.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

LFE-OMY0008

/min( 20L/min( 20L/min( 20L/min( 1 1 1 1-5V 5V 5V 5V ) ) ) ) [F22] 46 No.LFE*-OMY0008 [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

AC

-01, -02, -03, -04, -06, -10 after part number indicate port size. (-01: 1/8, -02: 1/4, -03: 3/8, -04: 1/2, -06: 3/4, -10: 1) Air filter Regulator Lubricator 1.1-29 AC2001 to 4001 Precaution Pressure Characteristics Flow Characteristics Condition: Supply pressure 0.7MPa Conditions: Supply pressure 0.7MPa Secondary pressure 0.2MPa Flow 20l/min(ANR) Be sure to read before handling.

Modular F.R.L. Unit

When mounting a check valve, make sure the arrow (IN side) points in the correct direction of air flow. 2 AC10 to 60 Conditions: Inlet pressure: 0.7MPa Outlet pressure: 0.2MPa Flow rate: 20L/min (ANR) Pressure Characteristics (Representative values) AC10 AC40-06 0.3 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.25 Set point 0.2 0.2 0.15 0.15 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9

Modular F.R.L. Unit

Pressure Characteristics (Representative values) Flow rate 20L/min (ANR) (You can visually verify this with the "orange AW20K AW40K mark" that appears in the gap.) Push the pressure regulator knob to lock.

HRX-OM-X010

/min) (104[PSIG] At 5.3 Pump capacity*4 MPa 0.65 (At 20L/min) (94[PSIG] At 5.3 [gal/min]) [gal/min]) Main Tank capacity*5 L Approx.15 (4 [gal]) Sub Tank capacity *6 L Approx.16 (4.2 [gal]) Circulating fluid port Rc 3/4 Facility water deg C /MPa 10 to 30 / 0.3 to 0.7 (45 to 100 [PSIG]) Rated condition*9 4 7 14 15 Facility water required flow rate L/min Temp. changing condition*10 10 12 15

LFE-OMZ0011

Sub screen Variable range Analogue output[V] Flow rate[L/min] 20L/min (Analogue 1-5V) Press the button to set. Return to function selection mode. [F22] Setting of analogue output complete. -46No.LFE*-OMZ0011 [F30] Accumulated flow value hold The default setting is to clear the accumulated flow value when the power supply is turned off.

IZx-OMX0087

Blow velocity distribution (IZT43(-L)) Energy saving static neutralization cartridge High speed static neutralization cartridge 4) Flow rate : 20L/min 1) Flow rate : 20L/min mm 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 mm ionizer to workpiece [mm] ionizer to workpiece [mm] 0 Installation distance from 0 Installation distance from 100 100 5m/s 10m

Modular Type Filter Regulator Series AW

Flow rate L/min (ANR) 0 0 0 500 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AW20 Rc 1/4 AW40 Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 600 800 400 200 0 2000 0 0 1000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Conditions: Inlet pressure 0.7MPa; Outlet pressure 0.2MPa; Flow rate 20L

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Digital Flow Switch for Deionized Water and Chemicals Digital Flow Switch for Deionized Water and Chemicals Body and sensor Body and sensor New PFA New PFA Tube Tube Super PFA Super PFA Three types of flow range 0.4 to 4l/min (PF2D504) 1.8 to 20l/min (PF2D520) 4.0 to 40l/min (PF2D540) Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool

LV50-OMQ0002

Press the S Flow rate[L/min] 20L/min (Analogue 1 5V) Press the button to set. Return to function selection mode. [F22] Setting of analogue output complete. -46No.LV50***-OMQ0002-G [F30] Accumulated value display The default setting is to clear the accumulated flow value when the power supply is turned off.

LFE-OMZ0013

Sub screen 2 20 24 Flow rate[L/min] 20L/min (Analogue 1-5V) Press the button to set. Return to function selection mode. [F22] Analogue output setting complete.

PAB-OM-K007

Recommended typical condition A: Obtain pilot air pressure when discharge rate is 20L/min and discharge pressure is 0.2MPa. 1. Plot the cross point between line with discharge rate 20L/min and line with pressure 0.2MPa. 2. Calculate pressure of transported fluid based on the point.