21

Up to Up to 21% 21% 21% Up to Up to 66 mm 66 mm 66 mm lighter lighter shorter shorter 138 mm 29 mm shorter CM3 CM3 CM3 NEW Female thread, Boss-cut CM3 CM3 CM3 NEW Male thread CM2 Conventional model Male thread CM3B40-50l stroke Series CM3 CAT.NAS20-212A Series CM3 Female rod end available as standard 2-color indication solid state auto switch mountable Applications expanded by making it possible

Cylinder with Lock Series CLS

Electrical entry Load voltage Wiring (output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Type Special function Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) 1 (M) IC circuit M9N M9P M9B J51 G39C K39C M9NW M9PW M9BW M9NA M9PA M9BA F59F A33 A34 A44 3-wire (NPN) 3-wire (PNP) G39 K39 IC circuit 5 V, 12 V 24 V Grommet 12 V 2-wire

Bore Size: 20mm, Pilot Port Location: R (Right), Stroke: 50mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 20mm, Pilot Port Location: R (Right), Stroke: 50mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bore Size: 20mm, Pilot Port Location: Right, Stroke: 50mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 20mm, Pilot Port Location: Right, Stroke: 50mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 1 pc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5

CQS

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L

CQS

Mounting Bolt for CDQSW/With Auto Switch Mounting bolt M3 X 35l X 40l X 45l X 50l X 55l X 60l M3 X 35l X 40l X 45l X 50l X 55l X 60l M5 X 45l X 50l X 55l X 60l Mounting bolt M5 X 65l X 70l X 75l X 80l X 85l X 90l M5 X 45l X 50l X 55l X 60l X 65l X 70l X 75l X 80l X 85l X 90l Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60

Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Table of Contents

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

PFA/PFW

/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow

PA3000/5000/PAX1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).