A_HEC-OM-K001 Take safety margins into consideration in the customers machine. 9.5.1 Performance of HED003 Conditions; Recirculating fluid: water (flow rate 15L/min), Facility water flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 800 Facility water 10oC Facility water 25oC 600 Cooling capacity W Facility water 35oC 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 9-7 Cooling
MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding
Control method PID control Ambient temperature andhumidity and altitude 12 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L
min 4 15 30 40 (1.1 [gal]/min) (4.0 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Ethylene glycol solution60% 0.35 / 0.55 0.45 / 0.65 0.40 / 0.60 0.35 / 0.55 (At 4L/min) (At 15L
Manually unlocking For 20 to 32 Dust cover holding bolt Dust cover Manual unlocking bolt Manual unlocking bolt Lock ring Locking direction Locking direction Lock ring Rod side Head side Rod side Head side MLGP--F: Extension locking MLGP--B: Retraction locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15L of more commercially available) into the lock
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Retraction locking Extension locking 2) Supply air pressure of 0.2MPa or more to unlocking port shown in the drawing on the left. 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a conventional bolt of M3 x 0.5 x 15l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E802 & N400 CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. !
Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 !
Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock.
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market
port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L
Specifications and how to order Specifications Model PAF3413 Actuation Air operated Main fluid: Suction/Discharge port RcGNPT 3/8 Female thread, 1/2 Tube extension, With nut (size 4, 5) Port size Pilot air: Supply/Exhaust port Rc, G, NPT 1/8 Body wetted areas newPFA Material Diaphragm/Seal PTFE Check valve newPFA, PTFE Discharge flow rate 1 to 15L/min Average discharge pressure 0 to 0.4MPa
Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply
Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3
Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3
PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951