2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.

Cylinder with Lock

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 The 1 m lead wire is only applicable to the D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Table of Contents

The packing class has been revised to adopt heat resistant materials for using it at a high temperature of up to 100C.

Basic type / Direct mount type Series CY3B/CY3R

A96V A96 5 V 12 V IC circuit Yes D24 V Grommet Relay, PLC A93V A90V A93 A90 100 V 2-wire No IC circuit 100 V or less -X Solid state auto switches marked with a symbol are produced upon receipt of order.

1

When using with the operating temperature from 60 up to 100C, and the piston speed of more than 200 mm/s, please consult with SMC separately. 2. When using with the operating temperature from 50 up to 100C, and the piston speed of less than 200 mm/s, XB6 specifications can be used. 3.

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Parallel Style Air Gripper Series MHZ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A90, A90V OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) Mass OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93, A93V 6 6 6 6 8 8 0.5 3 Lead wire length (m) LED Brown OUT (+) Brown 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions (mm) Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22) D-A96, A96V

Solid State Auto Switches

DD1629 Reed Auto Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) Refer to SMC website for the details of the products conforming to the international standards.

Cylinder with Lock Series CLS

Tie-rod mount Reed switches 2 color indication With timer 2 color indication 2 color indication/water resistant 2 color indication/with diagnostic output Direct mount D-A93 D-G39/K39 D-F5/J5 D-F5NTL D-F5W/J59W D-F5BAL D-F5F D-F9N Band mount Tie-rod mount Solid state switches D-F9P Direct mount D-F9B Models D-A90, D-A93, D-F9N, D-F9P and D-F9B are exclusively for use with the lock unit

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V F59F V V v v IC circuit Water-resistant (2-color indicator) Grommet Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P4DW V V v Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit 100 V A93

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Single clevis 0.16 0.23 0.37 0.60 1.07 1.73 Double clevis 0.20 0.32 0.45 0.71 1.28 2.11 Additional weight per 50 mm of stroke All mounting brackets 0.14 0.18 0.30 0.32 0.49 0.54 Accessories Rod end 0.07 0.11 0.22 0.40 Rod clevis 0.09 0.15 0.34 0.69 Calculation: Example) CP96SD40-100C OBasic weight 0.66 [kg] (Basic, 40) OAdditional weight 0.18 (kg/50 st) OCylinder stroke 100 [st] OMounting

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

V V V V Relay, PLC No 100 V or less A90V A90 V V IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1 m type lead wire is only applicable to D-A93. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ *

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 1 m lead wire is only applicable to the D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Long Stroke Slide Table Series MXY

/MXW8 Allowable moment (Nm) Weight Width Height (mm) Model (g) (mm) Pitch, Yaw Roll 30 25 MXY8-50 49 47 610 420 5.7 13 MXW8-50 5 3 MXY/MXW 4 times 1.14 times 0.95 times 0.8 times 0.7 times Stroke (mm) Stroke adjuster Auto switch Series 5 Metal stopper Rubber stopper Shock absorber 10 15 20 25 30 MXP 6 MXP10 MXP12 MXP16

01-mxy-e

Contents Bore size (mm) MXY6-PS MXY8-PS 6 8 12 MXY6-PS MXY8-PS MXY12-PS !0 !1 @2 @6 Wear ring A Resin A set of two of !0, !1, @2 and @6 each Wear ring B Resin MXY12-PS Cylinder scraper NBR As for MXY12, only one piston seal 26 is included. Piston seal NBR Replacement Parts: Grease Pack Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) 124

Toggle Type Air Gripper

Symbol Specifications/Description -X4 -X5 -X63 Heat resistance (100C) Fluororubber seal Fluorine grease 645 A Series MHT2 Effective Gripping Force Workpiece gripping point should be within the range indicated in the graph.

Bore Size: 8mm, Stroke: 100mm, Adjuster: C (Metal Stopper)