CXS 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100
A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With
600 0 100 200 300 400 500 100 200 300 400 500 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 6 Series MXQ Model Selection Model Selection Procedure Formulae/Data Selection Examples Operating conditions 1 Model to be used Type of cushion Work piece mounting position Mounting orientation Average speed Va (mm/s) Load weight W (kg) Overhang
, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Kit No.
500 100 200 300 400 600 500 100 200 300 400 600 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 142 Long Stroke Slide Table MXW Series Construction / Parts List Packing List 5 3 4 6 17 18 15 2 1 21 10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.
, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
A93 3 m L A93L Relay PLC 24 V 12 V Grommet Diagnostic indication (2 color indication) Yes 3-wire (NPN) 3-wire (PNP) 2-wire Refer to pages 8-30-1 for detailed auto switch specifications. 8-24-3 4 Series MGT Model Applicable auto switch Bearing type Turntable Bore size (mm) Cylinder Model Reed switch Solid state switch Reed switch Solid state switch Slide bearing Ball bushing bearing MGTM
IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.
L A93L Relay PLC 24V 12V Grommet Diagnostic indicator (2 color indicator) Yes 3 wire (NPN) 3 wire (PNP) 2 wire ** Refer to pages 6 to 9 for detailed auto switch specifications. 1 Series MGT Models Applicable auto switches Bearing type Turntable Bore size (mm) Model Cylinder Reed switch Solid state Reed switch Solid state Slide bearing MGTM 63 80 100 MGTL D-Y5 type D-Z7 type Note 1) Note
Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil (Example) A93 3 mL A93L
A93L 5m . Z (Ex.) F9NWZ Solid state auto switches marked with a "" are produced upon receipt of order.
L A93L MXPJ6/Precision Air Slide Table 6 Specifications Theoretical Output How to Order (N) MXPJ6 10 Cylinder bore size (mm) Piston area (mm) 0.2 Cylinder bore size (mm) Port size Fluid Action Operating pressure Proof pressure Operating pressure (MPa) 6 M3 x 0.5 Air Double acting 0.15 to 0.7MPa 1.05MPa 10 to 60C 50 to 500mm/s Rubber bumper Non-lube +1 0 mm Precision Air Slide Table 0.3 0.4
switch 100V 12V Grommet With 3-wire (equivalent to NPN) 5V A96V A96 IC circuit F9NV F9N 3-wire (NPN) Relay PLC F9PV F9P 3-wire (PNP) F9BV F9B 2-wire Solid state switch 24V With Grommet Diagnosis indication (2-Color indicaiton) 12V F9NWV F9NW 3-wire (NPN) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire PLC: Programable logic controller Lead wire length 0.5m " " (Example)A93 3 m " L " A93L
switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil (Example) A93 3 mL A93L
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.