MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.

XM, XY

Angle type M9N A 25 In-line type q w e r t y u w Flange type XMD q Flange size Size Symbol Type Applicable flange size XMD XYD 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) KF (NW) K (DN) CF 25 40 50 63 80 Nil D C XYD D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 Nil e Pilot port direction Rear flange surface XMD Rear flange surface XYD Symbol Pilot port direction Flange side Left flange surface

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Air Slide Table/Long Stroke Type Series MXY

20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8 29 7 13 18 90 21 4(depth 4) 4(depth 4) 4 50 8.5 114 42 33 n QL Model 50 100 150 200 250 200 250 300

NCQ8

L M9NL 197in (5 m) .

Long Stroke Slide Table Series MXY

MXY8-50 49 47 610 420 5.7 13 MXW8-50 5 3 MXY/MXW 4 times 1.14 times 0.95 times 0.8 times 0.7 times Stroke (mm) Stroke adjuster Auto switch Series 5 Metal stopper Rubber stopper Shock absorber 10 15 20 25 30 MXP 6 MXP10 MXP12 MXP16

Table of Contents

3 25, 25: 2 Qty.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 50 +0.02 0 (A, B, C common view) 3 x 5 depth 10 16h9 0 0.043 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 502 Series MHR2/MDHR2 Rotary Actuated Air Gripper 2-Finger Type With auto switch (Built-in magnet) : MDHR2-30R 76

Rotary Gripper Series MRHQ

Series MRHQ Rotary Gripper Gripper Inside Diameter/Size: 10, 16, 20, 25 !

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

01-mxp-e

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

1

Cable 0.3 mm2 x 25 cores O.D. 1.4 Lead wire color Dot marking Terminal no.

Magnetically Coupled Rodless Cylinder

Bore size (mm) Standard adjustment bolt 25 mm adjustment bolt 10, 15 CYF-S10 CYF-L10 10, 15 RB0805X552 25 CYF-S25 CYF-L25 25 RB1006X552 Note) Order 2 units for each unit of cylinder.

MXQ

25 mm) is not available in Series MXQ6.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A0803-8 MI-A1203-12 MI-A2003-20 MI-A2503-25 MI-A3203-32 MIW-A0804 MIW-A1204 MIW-A2004 MIW-A2504 MIW-A3204 MIW8-PS MIW12-PS MIW20-PS MIW25-PS MIW32-PS MH-G01 (contents quantity 30 g) !4, !5, !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A0803-8 MI-A1203-12 MI-A2003-20 MI-A2503-25 MI-A3203-32 MIW-A0804 MIW-A1204 MIW-A2004 MIW-A2504 MIW-A3204 MIW8-PS MIW12-PS MIW20-PS MIW25-PS MIW32-PS MH-G01 (contents quantity 30 g) !4, !5, !

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -