High Vacuum Angle Valve

Example) -M9NL !

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series

NCQ8

L M9NL 197in (5 m) .

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Table of Contents

x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 L L MHS Pressure 0.6 MPa 30 30 Pressure 0.6 MPa MHC 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) Internal grip MHT 0.4 MPa 20 20 0.4 MPa MHY 0.3 MPa 0.3 MPa 10 10 MHW 0.2 MPa 0.2 MPa MRHQ 0 10 20 30 40 50 0 10 20 30 40 50 Misc.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Long Stroke Slide Table Series MXY

20 25 30 MXP 6 MXP10 MXP12 MXP16

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

MXQ

15 B side parallelism to A side Refer to Table (1).

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

18.6 1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 18 6 8 24 1.8 20Data 2.7 M8 x 1 10.5 12 4 12 34 26 2.2 9 22.5 10 2.7 M8 x 1 11 12 4 9 26 15 40 36 2.8 14 M12 x 1.25 13 17 6 12.4 33 20 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

-20 -30 -10 -15 -10 -15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 1 9h9 M3 x 0.5 0.88 6 M3 x 0.5 0.88 6 3 6 M3 x 0.5 0.88 6 3 6 12h9 2 2 2 MHK 1.5 M4 x 0.7 2.1 8 M4 x 0.7 2.1 8 4 8 M4 x 0.7 2.1 8 4 8 14h9 M5 x 0.8 4.3 10 2 M5 x 0.8 4.3 10 5 10 M5 x 0.8 4.3 10 5 10 16h9 MHS 1 9h9 3 3 3 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 M3 x 0.5 0.88 6 6 3 3 12h9 MHC How to Locate Finger and Attachment How

MXW

MXW-A1212-X11 33.5 15 MXW-A1612 28.5 5 MXW16 10 M6 x 1 3 8 MXW-A1612-X11 15 38.5 MXW-A2012 5 34.5 MXW20 13 M8 x 1.25 4 10 15 MXW-A2012-X11 44.5 5 MXW-A2512 40 1 mm 1 mm Stroke MXW25 17 M10 x 1.5 5 14 15 MXW-A2512-X11 50 8-7-8 9 Long Stroke Slide Table Series MXW Precautions Shock Absorber Adjustment Specifications Caution RB0805 -X552 RB0806 -X552 RB1007 -X552 RB1412 -X552 RB2015 -X552 Shock

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.