NCG/CG1

to 49 st 50 st or more 10 st or more 15 to 49 st 60 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 65 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 75 st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st Trunnion style is not

High Vacuum Angle Valve

Example) -M9NL !

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series

Air Slide Table/Long Stroke Type Series MXY

MXY MTS Theoretical Output (N) Operating pressure (MPa) Cylinder bore (mm) 6 8 12 Piston area (mm2) 0.2 6 10 23 0.3 8 15 34 0.55 15 28 62 Magnetic Holding Force (N) 0.4 11 20 45 0.5 14 25 57 28 50 113 Made to Order Specifications (Refer to pages 1955 to 2021 for details.)

NCQ8

L M9NL 197in (5 m) .

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Table of Contents

x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure Gripping force (N) Gripping force (N) Pressure 0.6 MPa 15 15 0.6 MPa 0.5 MPa External grip 0.5 MPa 10 10 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 5 5 0.2 MPa 0.2 MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6 MPa Internal grip 30 30 Pressure 0.6 MPa 0.5 MPa Gripping

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 L L MHS Pressure 0.6 MPa 30 30 Pressure 0.6 MPa MHC 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) Internal grip MHT 0.4 MPa 20 20 0.4 MPa MHY 0.3 MPa 0.3 MPa 10 10 MHW 0.2 MPa 0.2 MPa MRHQ 0 10 20 30 40 50 0 10 20 30 40 50 Misc.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Rotary Gripper Series MRHQ

External Gripping/Double Acting Internal Gripping/Double Acting MRHQ10D MRHQ10D Pressure 0.7MPa 25 20 0.6MPa 20 Pressure 0.7MPa 15 0.5MPa Gripping force N Gripping force N 0.6MPa 0.5MPa 15 0.4MPa 10 0.3MPa 0.4MPa 10 0.3MPa 0.2MPa 5 0.2MPa 5 0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D External gripping Pressure 0.7MPa 60 50 0.6MPa 50 Pressure

Long Stroke Slide Table Series MXY

20 25 30 MXP 6 MXP10 MXP12 MXP16

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

Magnetically Coupled Rodless Cylinder

Contact SMC when disassembly or maintenance is necessary . 169 New New Magnetically Coupled Rodless Cylinder 6, 10, 15, 20, 25, 32, 40 RoHS Weight Overall length 15 % reduced 15 mm shortened Max.

MXQ

15 B side parallelism to A side Refer to Table (1).

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.