11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment V K C 5 C Max. 4 20 4 2-M4 x 0.7 depth

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32

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Conductor resistance /km, 20C 65 or less COM. COM. 13 (+) 13 () Voltage limit V, 1 minute, AC 1000 Positive common Negative common Insulation resistance M/km, 20C 5 or more Note) When using a valve with no polarity, either positive common or negative common can be used. Note) The minimum bending radius of the D-sub connector cable is 20 mm.

1

B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12

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Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

ISO Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

Table of Contents

(at 20C) Data 10-12-9 9 Series CEP1 Proper Auto Switch Mounting Position Weight (Without mounting bracket/connector) (kg) Regarding dimensions for the proper auto switch mounting position (at stroke end), refer to page 1012-16.

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

A

-10 MXP-AD10-10 6 Bore Size (mm) MXP10-20 MXP-AD10-20 M3 x 0.8 MXP12-15 MXP-AD12-15 With Magnet and Piping Port MXP12-25 MXP-AD12-25 Mounting Screw Air Fluid Used MXP16-20 MXP-AD10-20 Double Acting Action MXP16-30 MXP-AD12-25 0.15 ~ 0.7MPa / 22 ~ 102PSI Operating Pressure -10~60C / 14 ~ 140F Ambient & Fluid Temperature 50 ~ 500mm/s / 2 ~ 20in/s Operating Speed Range Rubber Bumper Cushion

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Use taps on the bottom. 758 A Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards. Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9, D-M9V (With indicator light) 2-wire load current is reduced (2.5 to 40 mA).

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(No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 20C, under the atmospheric pressure and the state of relative humidity 65%.

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

Parallel Style Air Gripper Series MHZ

/MHZL2-20C 100 Pressure 0.7 MPa 80 0.6 MPa Gripping force (N) 0.5 MPa 60 0.4 MPa 40 0.3 MPa 0.25 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 380 Parallel Style Air Gripper Series MHZ Effective Gripping Force: Series MHZ2/Double Acting/External Gripping Force Step 1 External Gripping Force External Gripping Force Indication of effective gripping force The effective gripping force shown

Air Cylinder Series CM2

Electrical entry Auto switch model Pre-wired connector Applicable load Lead wire length (m) 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Load voltage Indicator light Type Special function Wiring (Output) DC AC M9N M9P M9B H7C G39A K39A M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) 3-wire (PNP) 5V, 12V IC circuit Grommet Reed switch Solid state switch 2-wire 12V Connector IC circuit 3-wire (NPN) 2-wire

Smooth Cylinder/Low Speed Cylinder

Auto switch model Lead wire (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5

Free Mount Cylinder Series CU

CQM Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function 3 (L) Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) MU M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit IC circuit 5 V, 12 V Solid state

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.