Proposals for Energy Saving

Note 4) Indicates the bending value when the outside diameter rate of change is 10% or less at a temperature of 20C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

CE

Type Model Electrical entry Features Without indicator light D-A90 D-A90V Grommet (In-line) Grommet (Perpendicular) Reed switch Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

CE

Type Model Electrical entry Features Without indicator light D-A90 D-A90V Grommet (In-line) Grommet (Perpendicular) Reed switch Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

Stroke Reading Cylinder and Counter

Magnetic field resistance 14.5 mT Power supply 10.8 to 26.4 DC (Power supply ripple: 1% or less) Current consumption 40 mA Foot Note 1) Flange Bore size (mm) Double clevis Resolution 0.1 mm/pulse 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 Output type Open collector (24 VDC, 40 mA) CQ-L020 CQ-F020 CQ-D020 Output signal A/B phase difference output CQ-L032 CQ-F032

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

Table of Contents

D-A90 cannot be mounted on Series MY1HT.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment V K C 5 C Max. 4 20 4 2-M4 x 0.7 depth

CE

Supply voltage Minimum operating voltage of load > Internal voltage drop of switch 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator lamp (Model D-A80, A80H, A90, A90V). 3) Generally, the internal voltage drop will be greater with a 2 wire solid state auto switch than with a reed switch.

1

B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Special function Indicator light Wiring (Output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable load DC AC Perpendicular In-line IC circuit 5 V 12 V 100 V or less A90 A90V No Relay, PLC 24 V 2-wire A93 A93V Grommet 100 V 12 V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-X Body option Nil M Standard (Rod end female thread) Rod end male thread Cushion 20C Rubber bumper Piping Data Action Screw-in piping Built-in One-touch fittings Note) Nil F D Double acting Note) Bore sizes available w/ One-touch fittings are 32 to 63. Cylinder stroke (mm) Refer to Standard Stroke on page 7-6-122.

01-mxp-e

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

Bore Size: 10mm, Stroke: 20mm, Adjuster: Metal Stopper, Magnet: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 10mm, Stroke: 20mm, Adjuster: C (Metal Stopper)

Bore Size: 10mm, Stroke: 20mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Bore Size: 10mm, Stroke: 20mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 11 (Clean Type, Vacuum Suction), Bore Size: Ø10, Stroke: 20mm, Adjuster: C (Metal Stopper)

Bore Size: 10mm, Stroke: 20mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: A96--Reed, DC Volt, LED, Horizontal