Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

2

(No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 20C, under the atmospheric pressure and the state of relative humidity 65%.

Microspeed Cylinder

A90 A90V No Reed switch Solid state switch 2 wire 24V A93 A93V Grommet 100V 12V Yes 3 wire (NPN equiv.)

Proposals for Energy Saving

Note 4) Indicates the bending value when the outside diameter rate of change is 10% or less at a temperature of 20C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

CE

Type Model Electrical entry Features Without indicator light D-A90 D-A90V Grommet (In-line) Grommet (Perpendicular) Reed switch Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

CE

Type Model Electrical entry Features Without indicator light D-A90 D-A90V Grommet (In-line) Grommet (Perpendicular) Reed switch Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

CE

Type Model Electrical entry Features Without indicator light D-A90 D-A90V Grommet (In-line) Grommet (Perpendicular) Reed switch Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

Parallel Style Air Gripper Series MHZ

If using other screws, auto switch may be damaged. 2) If the internal resistance of a light emitting diode causes a problem, select an auto switch without an indicator light (DA6, A80, A80H, A90, A90V, C80, R80, 90, E80A, Z80). 3) Generally, the internal voltage drop will be greater with a 2wire solid state auto switch than with a reed auto switch.

Stroke Reading Cylinder and Counter

Magnetic field resistance 14.5 mT Power supply 10.8 to 26.4 DC (Power supply ripple: 1% or less) Current consumption 40 mA Foot Note 1) Flange Bore size (mm) Double clevis Resolution 0.1 mm/pulse 0.2 mm (at 20C) (1) Accuracy 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 Output type Open collector (24 VDC, 40 mA) CQ-L020 CQ-F020 CQ-D020 Output signal A/B phase difference output CQ-L032 CQ-F032

Table of Contents

D-A90 cannot be mounted on Series MY1HT.

CJ2X/CUX/CQSX/CQ2X/CM2X

(When the allowable interval is specified for each cylinder series, use the indicated value.) 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator light (D-A6, A80, A80H, A90, A90V, C80, R80, 90, E80A, Z80).

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

Air Cylinder Series MB

Rod Boot Material Max. ambient temperature Symbol Rod boot material J 20C Nylon tarpaulin 110C K Heat resistant tarpaulin Maximum ambient temperature for the rod boot itself.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment V K C 5 C Max. 4 20 4 2-M4 x 0.7 depth

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32

CE

Supply voltage Minimum operating voltage of load > Internal voltage drop of switch 2) If the internal resistance of a light emitting diode causes a problem, select a switch without an indicator lamp (Model D-A80, A80H, A90, A90V). 3) Generally, the internal voltage drop will be greater with a 2 wire solid state auto switch than with a reed switch.

1

B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12

Cylinder with Lock Series CLS

Auto switch (mm) Auto switch model D-A90 D-A93 D-M9N D-M9P D-M9B SMC CLS125 MODEL b a a b a b Bore size CLJ2 FREE LOCK CHECK 125 140 160 180 200 250 62 42 58 46 70.5 50.5 66.5 54.5 CLM2 Cylinder With$ Locking Mechanism 70.5 50.5 66.5 54.5 80.5 60.5 76.5 64.5 CLG1 86 66 82 70 102 82 98 86 CL1 Be sure to confirm operation after mounting.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Yes C73C A73C V V V V Connector No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indicator) Grommet Yes A79W V V Auto Switch Made to Order *1 Water resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance.