The MXH compact slide table provides a convenient integration of an endless track linear guide and air cylinder, with higher load carrying capabilities and longer standard strokes when compared to previous series. The use of a linear guide provides outstanding displacement accuracy against moments, and excellent parallelism of travel. The compact narrow profile of the unit allows for parallel

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x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Bore Size: 10mm, Stroke: 40mm, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: MDPC (1.0m Cord Length, M12-4 Pin Connector)

Bore Size: 10mm, Stroke: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 10mm, Stroke: 75mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Stroke: 30mm, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical

Bore Size: 10mm, Stroke: 75mm, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical

Bore Size: 10mm, Stroke: 100mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 10mm, Stroke: 100mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Stroke: 30mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Stroke: 15mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 10mm, Stroke: 60mm, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Stroke: 60mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 10mm, Stroke: 40mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Bore Size: 10mm, Stroke: 25mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Stroke: 100mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal