Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Slider Type Ball Screw Drive/11-LEFS Series

Model L A B n D E Without lock With lock 11-LEFS40ll-150l 564.5 594.5 156 328 4 150 11-LEFS40ll-200l 614.5 644.5 206 378 6 2 300 11-LEFS40ll-250l 664.5 694.5 256 428 6 2 300 11-LEFS40ll-300l 714.5 744.5 306 478 6 2 300 11-LEFS40ll-350l 764.5 794.5 356 528 8 3 450 11-LEFS40ll-400l 814.5 844.5 406 578 8 3 450 11-LEFS40ll-450l 864.5 894.5 456 628 8 3 450 11-LEFS40ll-500l 914.5 944.5 506 678

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

PFxx-OMS0001CN

[] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A PFMC 7 7 A*8 8 501 5~500L

AC

Using VY1500, lower the 500l tank pressure from 0.4 to 0.1. G AL a) If describing the above graph in accordance with graphs, the exhaust time is read; 27-3 = 24S. b) Then, to convert the time into one from a 500l tank. t = X Tank capacity Read ex1000 haust time Initial pressure 0.4MPa Numerical target of pressure lowering = X 24 500 1000 0.1MPa 12 Then, the result is 12S.

48

LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

Digital Flow Switch

Outside diameter Approx. 1.00 mm Insulator Colours Brown, White, Black, Blue +0.10 Sheath Outside diameter 3.5 -0.25 -64No.PF-OMP0002-H Characteristics data Analogue output A B C Voltage output 1 V 1.04 V 5 V Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min Pressure loss PFMB7501(500L

PFxx-OMP0001CN

CERoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 ADCPPSSUS304HNBR 100 g 155 g +35 g +25 g +30 g -63No.PF-OMP0001CN-F 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 (ZS-33-D) AWG26 1.00 mm +0.10 3.5 -0.25 -64No.PF-OMP0001CN-F A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

IDX-OM-W037

Reference data Reference Data 6.1 Specifications Item Specification IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 Fluid Compressed air Amount of air processed 100 to 500L/min (ANR) 200 to 800L/min (ANR) Inlet air temperature 5 to 40oC Inlet air pressure 0.3 to 1.0MPa Note 1) 2) Operating Ambient temperature 15 to 35oC (Relative humidity 85% or less) range Outlet air temperature adjustment

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

Bacteria Removal Filter

Specifications Port size Rc1/4, NPT1/4, G1/4, Rc3/8, NPT3/8, G3/8 Fluid Air, Nitrogen, Carbon dioxide gas(gas) Rated flow 500L/min (ANR)*1 Nominal filtration rating*2 0.01m (99.99%)*5 Operating pressure range*3 -100kPa to 1.0MPa (For nitrogen, Carbon dioxide gas: 0.99MPa) Operating temperature 5 to 45oC Initial pressure drop 0.03MPa(Inlet pressure 0.7MPa, at max. flow rate) Element proof

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

AMPSeries

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

ITV

Count Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply pressure: 100kPa Flow characteristics measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR) Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) 10 Set point 20 0.5

AMP

1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) Viewing the graph: When using AMP320 at a flow rate of 500l

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)