Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

XL

Electrical entry Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M Flange type Symbol Type Applicable flange size Nil 25, 40, 50, 63, 80 63, 80 D KF(NW) K(DN) Rated voltage Solenoid valve direction 1 100VAC, 50/60Hz Left flange surface Rear flange surface Right flange surface K L 2 200VAC, 50/60Hz 3 110VAC, 50/60Hz M 4 220VAC

High Vacuum Angle Valve, XL Series

Electrical entry Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M Flange type Symbol Type Applicable flange size Nil 25, 40, 50, 63, 80 63, 80 D KF(NW) K(DN) Rated voltage Solenoid valve direction 1 100VAC, 50/60Hz Left flange surface Rear flange surface Right flange surface K L 2 200VAC, 50/60Hz 3 110VAC, 50/60Hz M 4 220VAC

MY1

Therefore, also check the allowable load for the selected conditions. 10 16 20 25 32 40 0.8 1.1 0.8 6.1 6.1 6.1 3.7 4.9 3.7 10.8 10.8 10.8 11 16 11 17.6 17.6 17.6 MY1H 23 26 23 27.5 27.5 27.5 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load.

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 63mm, Thread: TN (NPT), Stroke: 300mm, Rod Boot: None, Cushion: N (Rubber Bumper), Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: MBPC (1.0m Cord Length, M8-4 Pin Connector)

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 63mm, Thread: NPT, Stroke: 300mm, Rod Boot: None, Cushion: Rubber Bumper, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-4 Pin Connector, Number: -, Made to Order: -

1

Round type) 1 2 JA T-bracket 32 50 T-bracket 32 50 MXH Mounting nut and rod end nut are included in the basic weight.

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

XMC/XYC Series

Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMC KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW

XMD/XYD Series

14 45 80 160 200 Conductance l/s Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange

XMA/XYA Series

l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

MY1

M14 x 2 M16 x 2 28 32 250 290 11 14 57 65 168 200 15 16 M8 x 1.25 47 50 44 60 122 147 105 M10 x 1.5 PA NH NW PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 50 63 090 110 60 70 118 142 120 140 186 220 10 12 26 42 380 436 28 30 35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these

MY1

NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 090 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 SS 10 13 Hole sizes for centralized piping on the bottom Bore size (mm) 50 63 S 8 9 WX 74 92 Y 18 18 Applicable O-ring C15 C15 (Mounting side should be machined to these dimensions.) 7

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

NC 44 60 NE 122 147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Mechanically Jointed Rodless Cylinder Series MY2

Load Mass Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 q r w e t 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load mass kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 D3 3 3 3 MY2H16 -X 2 2 2 2 0.2 MY2H16 MY2H16 Individual -X MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 090 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 SS 10 13 Hole sizes for centralized piping on the bottom Bore size (mm) 50 63 S 8 9 WX 74 92 Y 18 18 Applicable O-ring C15 C15 (Mounting side should be machined to these dimensions.) 7