15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16

Mechanically Jointed Rodless Cylinder Series MY1

( * * % # NW A GB N Z & ' ( . WW WW /*#! ( * * % # . . . 0 0 /*#! ( * * % # XX XX Centralized piping type Centralized piping type VV VV . . /*#! ( * * % # /*#!

MY1

For 10, 16, 20 Lead wire length (m) Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Indicator light Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Air Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

They should be used only to provide support. q l 50 m 40 (450) 30 MY2C40 l l 20 (380) MY2C25 MY2C16 w 10 0 2000 1000 mm 1500 500 Support spacing l 8-13-20 21 Mechanically Jointed Rodless Cylinder High Precision Guide Type Series MY2H/2HT 16, 25, 40 How to Order MX MTS H MY2 G 16 300 L M9N MY Number of auto switches CY Guide type 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder Series MY2

Z + Stroke (mm) LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A96 A93 M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Mechanically Jointed Rodless Cylinders

Indicator light Load voltage Pre-wired connector Applicable load Auto switch model Lead wire length (m) Electrical entry Solid state switch Type Reed switch Wiring (Output) Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) DC AC M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

NCG/CG1

Weight Unit: g Caution Precautions D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Fix the switch with appropriate screw installed on the switch body.

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

MY1

Load voltage Wiring (Output) Lead wire length (m) 0.5 (Nil) 1 (M) 5 (Z) Auto switch model Perpendicular Indicator light Pre-wired Type Special function Electrical entry connector Applicable load DC AC 25 to 40 50, 63 16, 20 25 to 63 16, 20 In-line 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) Solid state auto switch Reed auto switch 5 V, 12 V

Cylinder with Lock

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v Diagnostic indication (2-color indicator

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 1 (M) 5 (Z) 3 (L) None (N) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Yes A96V A96 Reed switch 5 V Grommet Relay, PLC 24 V 2-wire A93V A93 100 V 12 V 3-wire (NPN) M9NV M9N IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V Relay, PLC Yes Grommet 24 V Diagnostic indication 2-color indication F9NWV F9NW 3-wire (NPN) IC circuit 5 V 12 V 3-wire (PNP) F9PWV F9PW F9BWV F9BW 2-wire 12 V Notes) Solid state switches marked with a symbol are produced upon

17

Load voltage Wiring (Output) Auto switch model Lead wire length (m) Indicator light Electrical entry Pre-wired Type Special function connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Solid

XL-OMY0002

A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002 10. 10-1. 2 2P5P6 16 XL-OMY0002