Table of Contents

Unit Series AC10A to 40A Dimensions AC10A/20A A N F E P K C G G IN OUT Q Q F.R.L.

Stability of suction position,

0 r r r o e e e e u u y w u u w t u w t y y y y w t q w t q t q q q Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) Component Parts No.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !

With Factory Installed

Q) ~ 0.3 1 '"' l' Q. Q) Q. Cautions on Use o ~ ~ 0 0.2 I:". When the primary pressure has been released, the residual pressure (secondary pressure) cannot be removed. If removal of residual pressure is needed, please contact SMC. ---... 0.1 O.l SiHI---t-t---t--t--t--+--t,., . 7 . r" " 1 I':.

VQ5000

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

VQ4000

.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

0.4

Q DeviceNet Dust-protected: No part no.

Modular Type Air Filters Series AF

AF800 AF900 11345-5B 11345-5S No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

Table of Contents

0 IS1000 No. q w e r t y u i o !

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

KJ

w No. q w e r t y u i o !

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Base Mounted Metal Seal/Rubber Seal Series VQ

w e Note q w e Material Material No.