Vacuum Module Series ZX For ZSE2 For ZSP1 5A 10 ZS (For DC) ZL 4A 20 VJ10 6 5A 20 ZS For ZSE3 (For 100 VAC) ZY 6 Lead wire length 1A 36 VJ10 (Ordering example) ZX100-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly.
L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201
SOL.A 3A SOL.B 3B Station 3 SOL.A 4A SOL.B 4B Station 4 SOL.A 5A 10A COM 10B SOL.B 5B Station 5 SOL.A 6A SOL.B 6B Station 6 SOL.A 7A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 7B Station 7 Double wiring (connected to SOL. A and SOL.
connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)
Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.
39 Series VQ5000 Construction Plug-in Unit Metal seal Rubber seal type e e q w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11
Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing
6 23.0 7.9 0.95 0.5 26.0 1.10 8 3 0.33 670 830 670 830 640 7.9 0.33 3 4.5 15 23.0 0.61 3/8 (10A) 15.0 0.61 4.5 1.0 790 640 790 640 790 6 0.95 3/8 (10A) 23.0 0.95 6 Note) Weight of grommet type.
(arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No.
-www.stevenengineering.com Components Valve unit q ZL For vacuum switch and adapter A M2.5 x 0.45 x 41 2 e ZY Standard (Without options) M2.5 x 0.45 x 5 6 u With individual spacer M2.5 x 0.45 x 8 6 ZQ Standard (Without options) M2.5 x 0.45 x 49 4 !
Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.
Coil voltage 1.Type of actuation 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC 1 2 3 4 5 6 1 2 3 4 5 6 2. Seal type 5. Light/Surge voltage suppressor Nil E With Without Metal seal Rubber seal 0 1 3. Function 6.
6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.
Note 45(N)F (D-sub connector type) SX 000-50-3A--Q 3 5 : For SY3000 C4: 4 One-touch fitting C6: 6 One-touch fitting For SY5000 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P PG PH 45(N) (Flat ribbon cable type) 3 5 SX 000-50-5A--Q 45G PC wiring compatible 45 (Terminal block type) T T1 3 5 SX 000-50-7A--Q 1.2-152 Type45 Base Mounted Type SY3000/5000 Manifold Base
Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material
Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R
Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.