5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR3110-5E 3 sets (2 position single part no.) VFR3210-5E 2 sets (2 position double part no.) VVFS3000-10A 1 set (Blanking plate assembly part no.) AMC610-10 1 set (Exhaust cleaner part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VV5FS5-01T-061-04-CD VFS5100-5FZ VFS5200-5FZ VVFS5000-10A AMC810-14 1 3 2 1 1 Non plug-in type (6 stations) VV5FS5-10-061-04-CU VFS5110-5E VFS5210-5E VVFS5000-10A AMC810-14 (Manifold base) (2 position single) (2 position double) (Blanking plate) (Exhaust cleaner) 1 3 2 1 1 Refer to Best Pneumatics Vol. 6 for Exhaust Cleaner details. The asterisk denotes the symbol for assembly.

VFR

VFR3110-5E 3 sets (2 position single part no.) VFR3210-5E 2 sets (2 position double part no.) VVFS3000-10A 1 set (Blanking plate assembly part no.) AMC610-10 1 set (Exhaust cleaner part no.) VV5FR3-01T-061-03-CD 1 set (Manifold base part no.) VFR3100-5FZ 3 sets (2 position single part no.) VFR3200-5FZ 2 sets (2 position double part no.)

AC Servo Motor Driver (Network card type ）

Flickering Indicates that the link is established with traffic. 18 17 18EtherCAT COMMUNICATION 18.2.4 Connecting Ethernet cable POINT Use a twisted pair cable (double shielded) with Ethernet Category 5e (100BASE-TX) or higher as the Ethernet cable. The maximum cable length between nodes is 100 m.

KJ

for applicable tubing material Connection Tubing Barb fittings Barb elbow Barb elbow (H) Surface treatment (Color) Soft nylon tubing Polyurethane tubing Electroless nickel plated (Silver color) M3 Electroless nickel plated (Silver color) Nylon tubing 1 8 R , M5 Marking Marking Marking Soft nylon tubing Polyurethane tubing Electroless nickel plated (Black color) [Except stud] Body of M-5E

Table of Contents

for applicable tubing material Connection Tubing Barb fittings Barb elbow Barb elbow (H) Surface treatment (Color) Soft nylon tubing Polyurethane tubing Electroless nickel plated (Silver color) M3 Electroless nickel plated (Silver color) Nylon tubing 1 8 R , M5 Marking Marking Marking Soft nylon tubing Polyurethane tubing Electroless nickel plated (Black color) [Except stud] Body of M-5E

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Principal Parts Material C3604 (Electroless nickel plate) (Nipple M-3N, M-5N: Stainless steel 303) Nylon 66: GF30%, Stainless steel 304: NBR (PVC for M3) Material Body Gasket Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

Air Fittings & Tubing

Nipple Barb elbow (H) Body rotates at 360 around the stud axis Fitting to workpiece and fitting fitting connection possible M-5UN 4/2.5 X M5 M-5ALHN-4 For nylon tube M3 male X M3 male M-3N P.2.1-51 6/4 X M5 M5 M5 M-5ALHN-6 Bulkhead union P.2.1-50 P.2.1-49 Panel mount connection M5 female X M5 female Plug Barb elbow (H) 3.18/2.18 X M5 soft nylon Body rotates at 360 around the stud axis M-5E

Fieldbus System

pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E

Fieldbus System

SI Unit Note) End plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E 3 2 4 A 4 A 4 A 4 A U side D side PWR OUT 0 1 5 4 1P 1P 2 3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT u P, E port size (One-touch fittings) 7 8 1 2 3 4 5 Valve stations Symbol SY3000 SY5000 SY7000 I/O Unit stations 1 2 Nil 8 10 12 SS5Y3-12S6Q42-05B 1

5 Port Solenoid Valve Series SV1000/2000/3000/4000

pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E

5 Port Solenoid Valve

pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E

0.4

pilot] (Station n) (Station 1) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E

LEC-OM07605CN

187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

) RWw(n+5E) RWr(n+5F) RWw(n+5F) RWr(n+60) RWw(n+60) RWr(n+61) RWw(n+61) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+6E) RWw(n+6E) RWr(n+6F) RWw(n+6F) RWr(n+70) RWw(n+70) RWr(n+71) RWw(n+71) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+7E) RWw(n+7E) RWr(n+7F) RWw(n+7F) Unit No.2 EX600-GILB RWr(n+80) RWw(n+80) RWr(n+81) RWw(n+81) IO-Link IO-Link :

Fieldbus System

How to Order Manifold Assembly Example (SS5Y3-12S6l-l) 2-position single SY3130-5U1-C6 (3 sets) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD P, E port size (One-touch fittings) SI Unit Note) End Plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 SY3000 8 5/16" SY5000 10 3/8" Symbol Nil N 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E For N, sizes

M Series

Main materials Material Body Brass + Electroless nickel plating (Nipple M-3N, M-5N: Stainless steel 303) Gasket Nylon 66; GF30%, Stainless steel 304; NBR (PVC for M3) * Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2. 11 4.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E