KP/KPQ/KPG

radius mm Tubing roll length m 10 15 20 10 12 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30

Manually Operated Integral Fitting Type/Threaded Type Series LVH

TL/TIL LQ3 Guideline for tightening torque (Number of turns) Breaking torque (Nm) Tightening torque (Nm) Size LVA20 LVA30 LVA40 LVA50 2 to 3 0.5 to 1 2 to 3 turns 6 to 8 2 to 3 3 to 4 turns 11 to 14 5 to 7 3 to 4 turns 18 to 20 8 to 10 3 to 4 turns Guideline for tightening torque Number of turns when the fitting is screwed into the body with 2 to 3 windings of sealant tape applied to threaded

Air/Manually Operated High Purity Chemical Valve Series LV

Double acting Suck back Single type P P P A B A B Unit Single type Unit Air Operated Threaded Type Series LVA P.7 to P.14 LVA10 LVA20 LVA30 LVA40 LVA50 Model Orifice diameter 2 4 8 12 20 Port size Body material 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 SUS316 PPS PFA Valve type Type Symbol Basic type N.C. PA PB PA N.O. B A B A B A PB N.C. N.O.

CEx-OMI0064

-2 Bit0 19 D12 10 1 Bit0 1 D0 10 -2 Bit1 20 D13 10 1 Bit1 2 D1 10 -2 Bit2 21 D14 10 1 Bit2 3 D2 10 -2 Bit3 22 D15 10 1 Bit3 4 D3 10 Bit0 23 D16 10 2 Bit0 5 D4 10 Bit1 24 D17 10 2 Bit1 6 D5 10 Bit2 25 D18 10 2 Bit2 7 D6 10 Bit3 26 D19 10 2 Bit3 8 D7 10 Bit0 27 D20 10 3 Bit0 9 D8 10 Bit1 28 D21 10 3 Bit1 10 D9 10 Bit2 29 D22 10 3 Bit2 11 D10 10 Bit3 30 D23 10 3 Bit3 12 D11

CEx-OMB0060

101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3 9 D8 Digit of 10 Bit0 27 D20 Digit of 103 Bit0 10 D9 Digit of 10 Bit1 28 D21 Digit of 103 Bit1 11 D10 Digit of 10 Bit2 29 D22 Digit of 103 Bit2 12 D11

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown D11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch 20OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 12-13-13 14 Solid State Switch Rail Mounting Style

Table of Contents

D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown D11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch 20OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 12-13-13 14 Solid State Switch Rail Mounting Style

Rotary Table/Rack & Pinion Style Series MSQ

D11 Auto Switches Precautions 3 Be sure to read this before handling. Wiring Caution 1. Confirm proper insulation of wiring. Be certain that there is no faulty wiring insulation (contact with other circuits, ground fault, improper insulation between terminals, etc.). Damage may occur due to excess current flow into a switch. 2. Do not wire with power lines or high voltage lines.

Low Profile Air Gripper Series MHF2

MHK 4 x M3 x 0.5 thread depth 4 4 x M2.5 x 0.45 thread depth 3 (Attachment mounting thread) Auto Switch Mounting Groove Dimensions 26 MHS (Mounting thread) MHC M2.5 x 0.45 4 MHT 1.3 12 26 MHY 15 4 Accessory option: Hexagon socket head screw (special screws) MHW 3 2 x 2H9 +0.025 0 depth 2 3 -X 7 7 MRHQ 11 11 Groove for auto switch mounting (Mounting thread) 2 x M3 x 0.5 thread depth 4 MA D11

Electric Actuator

Specific Product Precautions 34 Series LECS; Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) Note 2) CN3 CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP EM1 20 Forced stop In position D11 2 Upper stroke limit (FLS) 15 ALM RA3 Failure Note 3) D12 12 Lower stroke limit (RLS) 10 DICOM D13 19 Proximity dog (DOG) 6 LA

Step Motor Controller

When it is OFF (alarm occurs), stop the sequencer signal using the sequence program. 13 Series LECSm Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) Note 2) CN3 CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP Forced stop EM1 20 In position D11 2 Upper stroke limit (FLS) 15 ALM RA3 Failure Note 3) D12 12 Lower stroke

Electric Actuator

When it is OFF (alarm occurs), stop the sequencer signal using the sequence program. 117 Series LECS; Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) CN3 Note 2) CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP EM1 20 Forced stop Upper stroke limit (FLS) Lower stroke limit (RLS) Proximity dog (DOG) In position D11

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P,E Port Location: U Side, A,B Port Size: 01 (1/8), Thread: N (NPT), Mounting: D11 (Longer than Standard DIN Rail)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P,E Port Location: U Side, A,B Port Size: 01 (1/8), Thread: T (NPTF), Mounting: D11 (Longer than Standard DIN Rail)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P,E Port Location: U Side, A,B Port Size: KN7 (ø1/4" One-touch Fitting, Replaceable), Thread: T (NPTF), Mounting: D11 (Longer than Standard DIN Rail)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), A,B Port Size: 01 (1/8), Thread: N (NPT), Mounting: D11 (Longer than Standard DIN Rail)

Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P,E Port Size: N (ø3/8" One-touch Fitting, Inch), Mounting: D11 (Longer than Standard DIN Rail)

Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P,E Port Size: N (ø3/8" One-touch Fitting, Inch), Mounting: D11 (Longer than Standard DIN Rail)

Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P,E Port Size: N (ø3/8" One-touch Fitting, Inch), Mounting: D11 (Longer than Standard DIN Rail)

Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, P,E Port Size: ø10 One-touch Fitting, Metric, Mounting: D11 (Longer than Standard DIN Rail)