SMC Corporation of America
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(P.124) Wetted Parts Material S H Wetted Parts Body Surface finish Spring Diaphragm Poppet Seat Hastelloy C-22 Electropolish Inconel 600 316L SS secondary remelt Electropolish + Passivation 316L SS Elgiloy Hastelloy C-22 PCTFE 316L SS PCTFE (Option: Vespel) 106 Diaphragm Valve for Ultra High Purity Air operated type (For high pressure and high flow) Series AP3130 & 3113 AZ AK KT BP Diaphragm

Changes from the standard type are: KT10F KT10H KT10R KT10J KT10L KT10N KT10P Option Other Parameters HF Source pressure Cv 6000 psig (41.4 MPa) 0.12 Wetted Parts Material S B 316 SS 316 SS Brass Bronze 300 SS series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve

LEC LEC S LEC SS-T * Specifications and dimensions for the 25A-series are the same as standard products.

LEC SS-T The stroke adjustment unit is built into the product.

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA

Materials [316 SS] An austenitic stainless steel with a higher nickel content to improve its corrosion resistance. [316L SS] A low-carbon form of 316 SS which has better intergranular corrosion resistance than 316 SS. 143 Technical Data/Glossary of Terms [Compression fitting] A self aligning tube fitting that uses a ferrule to compress on the tubing effecting a seal when the nut is tightened

Materials [316 SS] An austenitic stainless steel with a higher nickel content to improve its corrosion resistance. [316L SS] A low-carbon form of 316 SS which has better intergranular corrosion resistance than 316 SS. 143 Technical Data/Glossary of Terms [Compression fitting] A self aligning tube fitting that uses a ferrule to compress on the tubing effecting a seal when the nut is tightened

ZZ ZZ SS SS Z Z K CXSJ 10 M L CXSJ 15 M L CXSJ 20 M L CXSJ 25 M L CXSJ 32 M L Model Stroke SS ZZ Z K 110 120 125 150 200 175 80 150 90 110 120 125 150 110 120 125 110 120 125 150 175 200 100 110 120 125 150 200 175 190.5 200.5 205.5 230.5 255.5 280.5 124.5 136 88 92 134.5 146 98 102 80 100 144.5 156 108 112 154.5 166 118 122 164.5 176 128 132 169.5 181 133 137 194.5 206 158 162 167.5 180

secondary remelt Electropolish + Passivation 316L SS Ni-Co alloy Ni-Cr-Mo alloy PCTFE 316L SS PCTFE (Option: Polyimide) Dimensions inch (mm) AP3125 2.05 (51.8) 1.48 (37.3) 0.94 (23.9) 0.715 (18.2) 3.86 (98.0) A A AP3150 Indicator switch AP3157 1.87 (47.5) AP3150 1.88 (47.8) AP3100 2.12 (53.8) Indicator switch (Option) AP3157 4.46 (113.3) AP3150 3.94 (100.1) AP3100 3.74 (95.0) 0.715 (18.2

Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1.0 thread depth 9 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) CX D2-M5 x 0.8 Cylinder port -X 20Data 2-M4 x 0.7 thread depth 5 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 4-5.5 through 4-9.5 counterbore depth 5.5 2-RB1006-X552 (Shock absorber) (mm) ZZ 184 234 284 334 384 434 484 Z 156 206 256 306 356 406 456 S SS

Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.

584 C85 CXWM20-275 119.5 289 20 90 620 277 329 606 634 CXWM20-300 132 314 20 90 670 302 354 656 684 C95 CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L Model Stroke SS ZZ Z Model F L K P Q S SS Z ZZ CP95 175 257 287 200 282 312 125 207 237 150 232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

H O W T O O R D E R S E R I E S NCA1 A I R C Y L I N D E R X T A1 NC C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) A U T O S W I T C H Standard D w/Auto S (Stainless Steel Composite Tube Only) ST SS SCT SSCT ...

O T T Y P E NC(D)GLN_-_ A N D NC(D)GLA_-_ L O N G S T R O K E ( I N C H) BORE LB STROKE RANGE SIZE ZB 3.02 8.01~20 20 3.60 3.02 12.01~25 25 3.72 3.09 12.01~40 32 4.05 3.41 12.01~45 40 4.37 4.00 12.01~55 50 5.27 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body BORE MAX STD SIZE STROKE A AB AH Y DD AL AO AT D EE KK LB MM P R SS

LEC SS-T 100 LEC Y Lead 12: LEY25A Selection example) Based on the graph shown on the right side, Torque limit/Command value: 30 [%] Force: 255 [N] Therefore, the LEY25B is temporarily selected. 0 20 10 40 30 Motorless Torque limit/Command value [%] (LEY25) LAT LZ Step 3 Check the lateral load on the rod end.

Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket