Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: With Regulator, ON/OFF Valve: V2 [Manual Operation Valve (w/Lever Lock)], Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: PNP Open Collector, 2 Outputs, Regulator: w/Regulator+Pressure Outlet Port Assembly, ON/OFF Valve: With Air Operated, Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: P2 [PNP Open Collector,1 Output+Analog Output (1 to 5V)], Regulator: With Regulator, ON/OFF Valve: With Air Operated, Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: Without Regulator, ON/OFF Valve: With Air Operated Flow Adjuster, Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: Without Regulator, ON/OFF Valve: With Air Operated Flow Adjuster, Restrictor: With Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: Without Regulator, ON/OFF Valve: Without ON/OFF Valve, Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: P1 [NPN Open Collector,1 Output+Analog Output (1 to 5V)], Regulator: With Regulator, ON/OFF Valve: V2 [Manual Operation Valve (w/Lever Lock)], Restrictor: Without Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: With Regulator, ON/OFF Valve: Without ON/OFF Valve, Restrictor: With Restrictor, Filter: With Filter

Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: NPT3/8, Digital Flow Switch: Without Digital Flow Switch, Regulator: With Regulator, ON/OFF Valve: With Air Operated, Restrictor: With Restrictor, Filter: With Filter

Compressed Air Quality: General Dry Air, Treatment Air Flow Rate(l/min): 500, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 3/8, Connecting Tube Diameter: -, Filtration Level: 0.01μm, Operating Environment: Clean Room Specifications (Prevent dust), Operating Pressure Range(MPa): null～0.7, Drain Cock: No, Bowl Material: [Resin] Nylon Case, Bowl Guard: No, Specification: With filter,

Gun Type Ionizer

Modularized digital flow switch, regulator, ON/OFF valve, restrictor, and filter SFD Series LLB Series LLB4 LLB3 * Please contact SMC for clean room compatible ionizers. Related Products Polyurethane Coil Tubing S Couplers Finger Valve Flexible Max. operating pressure: 0.8 MPa (at 20C) For moving applications * Colors other than black are available as made-to-order specifications.

Table of Contents

Plug-in type Non plug-in type Applicable terminal: 1.253, 1.25-3S, 1.25Y-3N, 1.25Y-3S, but in the case of with DIN connector board, is not a terminal structure.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Applicable terminal: VFR2000, VFR3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFR4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M 7 mm or less 7 mm or less VQC Corresponding to R1.25-3 of JIS C 2805 Position Model Left Center Right 4 mm or more VQZ VFR610 A side COM VFR620 SQ A side COM B side Series VFR5000 J.S.T. Mfg. Co., Ltd.

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

VFS

Plug-in type Non plug-in type Applicable terminal: 1.253, 1.25-3S, 1.25Y-3N, 1.25Y-3S, but in the case of with DIN connector board, is not a terminal structure.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Applicable terminal: VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFS4000/5000/6000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

VFR

Applicable terminal: VFR2000, VFR3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFR4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M 7 mm or less 7 mm or less Position Model Left Center Right Corresponding to R1.25-3 of JIS C 2805 VFR610 A side COM 4 mm or more VFR620 A side B side COM Series VFR5000 3 VFR640 5 A side B side COM J.S.T. Mfg. Co., Ltd.

G15/G27

.: G36-00-00-3N) Polycarbonate (Part no.: G46-00-00-3) Nylon (Part no.: G46-00-00-3N) Clear cover Material Stud Bourdon tube Brass Brass 0.04 0.05 Mass (kg) Note 1) When mounting a pressure gauge, use caution not to tighten excessively. Excessive tightening will cause product to be damaged. Use a pipe tape for sealing.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Principal Parts Material C3604 (Electroless nickel plate) (Nipple M-3N, M-5N: Stainless steel 303) Nylon 66: GF30%, Stainless steel 304: NBR (PVC for M3) Material Body Gasket Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2.

42

Applicable terminal: 1.25-3s, 1.25Y-3, 1.25Y-3N, 1.25Y-3.5 533 VQ4000/5000 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.