VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.High output motor

Digital Flow Switch

Outside diameter Approx. 1.00 mm Insulator Colours Brown, White, Black, Blue +0.10 Sheath Outside diameter 3.5 -0.25 -64No.PF-OMP0002-H Characteristics data Analogue output A B C Voltage output 1 V 1.04 V 5 V Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min Pressure loss PFMB7501(500L

PFxx-OMP0001CN

CERoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 ADCPPSSUS304HNBR 100 g 155 g +35 g +25 g +30 g -63No.PF-OMP0001CN-F 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 (ZS-33-D) AWG26 1.00 mm +0.10 3.5 -0.25 -64No.PF-OMP0001CN-F A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

IDX-OM-W037

Reference data Reference Data 6.1 Specifications Item Specification IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 Fluid Compressed air Amount of air processed 100 to 500L/min (ANR) 200 to 800L/min (ANR) Inlet air temperature 5 to 40oC Inlet air pressure 0.3 to 1.0MPa Note 1) 2) Operating Ambient temperature 15 to 35oC (Relative humidity 85% or less) range Outlet air temperature adjustment

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

Bacteria Removal Filter

Specifications Port size Rc1/4, NPT1/4, G1/4, Rc3/8, NPT3/8, G3/8 Fluid Air, Nitrogen, Carbon dioxide gas(gas) Rated flow 500L/min (ANR)*1 Nominal filtration rating*2 0.01m (99.99%)*5 Operating pressure range*3 -100kPa to 1.0MPa (For nitrogen, Carbon dioxide gas: 0.99MPa) Operating temperature 5 to 45oC Initial pressure drop 0.03MPa(Inlet pressure 0.7MPa, at max. flow rate) Element proof

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

AMPSeries

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

ITV

Count Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply pressure: 100kPa Flow characteristics measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR) Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) 10 Set point 20 0.5

AMP

1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) Viewing the graph: When using AMP320 at a flow rate of 500l

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 0 (NPN Open Collector 2 Outputs)