Electric Actuator/Slider Type

25 LECSA -S1 S3 200 32 LECSA -S3 S4 400 40 LECSA2-S4 Motor option Stroke [mm] 100 25 LECSB -S5 LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

ITV

0 25 50 75 100 Input signal [% F.S.]

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Title not found

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

Volume (cm 3) Vane type Double vane Single vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 90 100 100 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Volume (cm 3) Vane type Double vane Single vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 90 100 100 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Volume (cm 3) Vane type Double vane Single vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 90 100 100 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

Environment

2 Driver type* Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1 100 to 120 A2 LECSA2 200 to 230 B1 LECSB1 100 to 120 B2 LECSB2 200 to 230 C1 LECSC1 100 to 120 C2 LECSC2 200 to 230 S1 LECSS1 100 to 120 S2 LECSS2 200 to 230 LEY25: 200 mm or less LEY32: 100 mm or less *3 Rod flange is not available for the LEY25 with stroke 30 mm and motor option With lock. *4 Head