PFxx-OMP0001CN

CERoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 ADCPPSSUS304HNBR 100 g 155 g +35 g +25 g +30 g -63No.PF-OMP0001CN-F 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 (ZS-33-D) AWG26 1.00 mm +0.10 3.5 -0.25 -64No.PF-OMP0001CN-F A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

IDX-OM-W037

Reference data Reference Data 6.1 Specifications Item Specification IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 Fluid Compressed air Amount of air processed 100 to 500L/min (ANR) 200 to 800L/min (ANR) Inlet air temperature 5 to 40oC Inlet air pressure 0.3 to 1.0MPa Note 1) 2) Operating Ambient temperature 15 to 35oC (Relative humidity 85% or less) range Outlet air temperature adjustment

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

Bacteria Removal Filter

Specifications Port size Rc1/4, NPT1/4, G1/4, Rc3/8, NPT3/8, G3/8 Fluid Air, Nitrogen, Carbon dioxide gas(gas) Rated flow 500L/min (ANR)*1 Nominal filtration rating*2 0.01m (99.99%)*5 Operating pressure range*3 -100kPa to 1.0MPa (For nitrogen, Carbon dioxide gas: 0.99MPa) Operating temperature 5 to 45oC Initial pressure drop 0.03MPa(Inlet pressure 0.7MPa, at max. flow rate) Element proof

air-filter-e

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

AMPSeries

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l

ITV

Count Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply pressure: 100kPa Flow characteristics measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR) Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) 10 Set point 20 0.5

AMP

1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) Viewing the graph: When using AMP320 at a flow rate of 500l

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Body Size: 250C [17SCFM (500l/Min), Approx. Compressor Output 5HP, (3.7kW)], Thread: Rc, Port Size: 02 (1/4), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded), IN-OUT Direction: Standard, Pressure Switch 125VAC, 30VDC: None, Element Service Indicator: T (Yes)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 0 (NPN Open Collector 2 Outputs)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 0 (NPN Open Collector 2 Outputs), Unit: M (S1 Fixed Unit)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 1 (PNP Open Collector 2 Outputs)

Flow Range: 1 (PF2A511: 10-100l/min, PF2A521: 20-200l/min, PF2A551: 50-500l/min), Output Specification: 1 (PNP Open Collector 2 Outputs), Unit: M (S1 Fixed Unit)

Solid State Vacuum Regulator

Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR)

VCA

Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Thermo-dryer

(0.5 MPa) 1.16 0.88 Outlet air set temperature Outlet air set temperature 68F (20C) 77F (25C) Check the coefficient. 3 Correction factor = 1.36 1.07 0.50 1.16 = 0.84 Correction factor = 1.11 1 0.67 0.88 = 0.65 Calculate the corrected air flow capacity. 4 Corrected air flow capacity = 10.6 scfm (300L/m) 0.84 = 12.6 scfm (355 L/min [ANR]) Corrected air flow capacity = 17.7 scfm (500L

Exhaust Cleaner for Clean Rooms AMP Series

from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l