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73 3/8 [1(P), 2(A), 4(B), 5(EA), 3(EB) port] 22.5 28.8 Note) These figures show the SY7200-5Z1-WO-B03F. 39 Directional Control Valves SY Metal Base Plug-in EX600 VM XT34 Side ported Bottom ported Top ported INDEX 40 Type 50, 51, 52 Series SY3000/5000/7000 Metal Base Plug-in Manifold Specifications D-sub connector Serial wiring Flat ribbon cable Model F type P type PH type PG type J type S5

Size: 32, Motor Mounting Position: D (In-line Type), Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: None, Rod End Thread: M (Male)

Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: None, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for

Information

A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Symbol Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5

Cylinder with Lock

CBH14 CDH9 EB EW L MR UBh14 XD 32 26 10 65 26 0.2 0.6 12 9.5 45 200 40 28 12 75 28 0.2 0.6 15 12 52 226 50 32 12 80 32 0.2 0.6 15 12 60 245 63 40 16 90 40 0.2 0.6 20 16 70 269.5 80 50 16 110 50 0.2 0.6 20 16 90 320 100 60 20 140 60 0.2 0.6 25 20 110 353.5 Pivot Bracket: Double Clevis Pivot Bracket Double clevis pivot bracket XD + Stroke Z + Stroke EM G1 CKH9 R1 B 90 l1 H6 E2 d2 l3 A CA S5

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Title not found

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

LECSC;-S5 LECSS;-S5 LECSB;-S7 LECSC;-S7 LECSS;-S7 3: Refer to the table below for details.

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Slider Type Ball Screw Drive/11-LEFS Series

LECSC-S5 LECSS-S5 S6* Nil Without option B With lock 25 32 40 u Vacuum port* R: Right S7 200 32 LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (Absolute encoder) Nil Left R Right D Both left and right S8 400 40 LECSB2-S8 LECSC2-S8 LECSS2-S8 Nil: Left * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Specifications General Specifications Ambient -5 to 50oC (No condensation) temperature range Fluid Air, inert gas Vibration 30m/s2 (Without pressures sensor/vacuum pressure switch, With pressure sensor) resistance Note 1) 20m/s2 (With switch) Impact 150m/s2 (Without pressures sensor/vacuum pressure switch, With pressure sensor) resistance Note 2) 100m/s2 (With switch) Note 1)

Vacuum Unit Ejector / Vacuum Pump System

Specifications General Specifications -5 to 50oC (Without pressure sensor and pressure switch, With pressure switch, Ambient temperature range With pressure switch with energy saving function) (No condensation) 0 to 50oC (With pressure sensor) Fluid Air 30m/s2 (Without pressure sensor and pressure switch, With pressure sensor) Vibration resistance Note 1) 20m/s2 (With pressure switch) 150m

Vacuum Unit Ejector / Vacuum Pump System

Specifications General Specifications -5 to 50oC (Without pressure sensor and pressure switch, With pressure switch) 0 to 50oC (With pressure sensor) Ambient temperature range 5 to 50oC (With pressure switch with energy saving function) (No condensation) Fluid Air 30m/s2 (Without pressure sensor and pressure switch, With pressure sensor) Vibration resistance Note 1) 20m/s2 (With pressure switch) 150m