Slider Type Ball Screw Drive/11-LEFS Series

LECSC-S5 LECSS-S5 S6* Nil Without option B With lock 25 32 40 u Vacuum port* R: Right S7 200 32 LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (Absolute encoder) Nil Left R Right D Both left and right S8 400 40 LECSB2-S8 LECSC2-S8 LECSS2-S8 Nil: Left * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

LEY-OM007

. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32C-300, I/O cable length / communication plug(m): 3, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32C-100, I/O cable length / communication plug(m): 5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32C-30, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32C-100, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32C-100, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: DIN rail mounting type

ZB-OM00301

V Assy ZB1-VPN3--A KJ-C1 ZB1-FE3-A 30m 10 1 ZB1-SE1-A 10 1 Assy ZB1-PS-A Assy ZB1-ZS-A Assy ZZB26 - No.ZB-OM00301 () ZB1-VQ110U() ZB1-VQ110LZB03 ZB04 ZB05 ZB06 ZB00 () ZB1-VQ120U() ZB1-VQ110 K1 N.C. N.C. () () () () () () () () () () J1 N.C.

Profile Design ISO/VDMA Air Cylinder Series CP95

3.3 32.5 3 11.5 41 5 5.5 22 10 30 10.5 6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5

2/3 Port Valve

P1 P2 P1 P1 Wide selection of port sizes and variations Thread (6A to 50A) Flange (32F to 80F) VX VN VQ Low water hammer Max.1.2MPa In case of VNC211A(N.C. 0.5MPa) Cv0.7 to 100 Large flow capacity Conditions: Piping length/30m Steel tube, full pressure/0.5MPa 4.2-19 VNC How to Order Seal material Bracket A B NBR seal FPM seal B With bracket None Valve size: 1, 2, 3, 4. 2 0 1 A VNC 15A Air

Series VQ Metal Seal/Rubber Seal Body Ported

Air/Inert gas Air/inert gas Fluid (3) Max. operating pressure 0.7MPa (High pressure: 0.8MPa) 0.1MPa 0.15MPa Single Min. operating Double (Latching) 0.18MPa 0.18MPa pressure 3 position 0.15MPa 0.2MPa Valve Ambient and fluid temperatue 10 to 50C (1) Lubrication Not required Non-locking push style/Push-locking slotted, lever styles (option) Manual override (2) Impact/Vibration resistance 150/30m

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: None, Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5