Smooth Cylinder/Low Speed Cylinder CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.
Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa
Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.
Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.
Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.
. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.
300 12 300 7 300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A
JXC-OMU0029-A LEY32A / LEYG32A LEY32B / LEYG32B LEY32C / LEYG32C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2 40 400 23 400 20 400 3 48 500 27 500 30 500 4 56 600 32 600 40 600 5 64 700 44 700 50 700 6 80 800 54 800 60 800 7 100 900 77 900 70 900 8 150 1000 90 1000 80 1000 9 200 1200 120
Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-200, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type
Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-100, I/O cable length / communication plug(m): 3, Controller/driver mounting method: DIN rail mounting type
Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-200, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type
/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow
Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).
Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).
Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).
SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse
Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6N (LECA6, NPN, Step Data Input Type), I/O Cable
Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: B (w/Lock), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6N (LECA6, NPN, Step Data Input Type), I/O Cable Length
Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6N (LECA6, NPN, Step Data Input Type), I/O Cable