Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A LEY32A / LEYG32A LEY32B / LEYG32B LEY32C / LEYG32C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2 40 400 23 400 20 400 3 48 500 27 500 30 500 4 56 600 32 600 40 600 5 64 700 44 700 50 700 6 80 800 54 800 60 800 7 100 900 77 900 70 900 8 150 1000 90 1000 80 1000 9 200 1200 120

JXCx-OMU0004

3000 400 3000 LEFS32H LEFS32A LEFS32B LEFS40H LEFS40A LEFS40B 2] 2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 16 200 8 200 30 200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700

LEY-OM007

1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a.

JXCx-OMT0023

command Program end 500[r/min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Electric Actuator

500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

Electric Actuator

Belt Drive/Series LEJB Work load: Horizontal (kg) 2 Equivalent lead Speed (mm/s) (mm) Stroke (mm) 1 Page Size 10 5 15 20 25 30 500 1000 1500 2000 2500 3000 (200), 300, (400), 500, (600), (700), 800 40 27 (900), 1000, (1200), (1500), (2000) Page 14 (300), (400), 500, (600), (700), 800 63 42 (900), 1000, 1200, (1500), (2000), (3000) 1 Strokes shown in ( ) are produced upon receipt of order.

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator/Slider Type

1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L3 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work

2

500 110 Auto-drains listed on page 95 are attached.

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

LJ1H

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) Model 15 20 25 30 LJ1H20PC-500LJ1H20PC-600LJ1H20PC-700LJ1H20PC-800LJ1H20PC-900LJ1H20PC-10001000 1000 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 930 740 600 500 9 Standard Motor Horizontal Mount Motor Output High Rigidity Direct Acting Rolled Ball Screw 100 W 15 mm/10 mm lead Guide Series

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 500 1000 10 0.6 1.6 10.6 50.6 100.6 100 0.6 0.7 1.6 5.6 10.6 Speed (mm/s) 250 0.6 0.7 1.0 2.6 4.6 500 0.6 0.7 0.9 1.7 2.7 Values will vary slightly depending on the operating conditions.