ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

IR Series) 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 sliding resistance [MPa] Pressure equivalent to C96SD50-200C Example B Example A Driving roller Winding roller Precision regulator Precision regulator (Moving object) f C96YD50-200C Pressure [MPa] Example B Specifications Precision regulator Made to Order (For details, refer to pages

FEP Tubing (Fluoropolymer) Series TH

FEP Tubing (Fluoropolymer) Heat resistance:200C It changes according to the operating pressure.

Fluoropolymer Piping Equipment

Applicable to TD TID Maximum operating temperature 200C chemical liquids such as acid, alkali and deionized water. As the tube runs through the fitting itself, a setting is available for any optional position. TH TIH Taper thread Thread type: R, NPT Body Material: New PFA Collet The tube is held securely in place by the tightening nut and collet.

Safety Instructions

" 9.53 TID13 1/2" 12.7 inch mm 1/8" 3.18 Tubing O.D. 0.124" (1/8") 0.156" (5/32") 0.25" (1/4") 0.374" (3/8") 0.086" inch Tubing I.D. mm 8 m 16 m 2.18 3.15 3.95 6.33 9.5 Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Roll Color Fluid Note 1) Translucent (material color) Air, Water, Inert gas Fluoropolymer fitting LQ1 series 20C 100C 200C

JXCx-OMU0004

400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 57 No.JXC-OMU0004-A LEY25A LEYG25A LEY25B

Programless controller Step motor (servo 24 VDC)

2 30 400 15 400 8 400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY25A / LEYG25A LEY25B

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY25B-100, I/O cable length / communication plug(m): 5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY25B-400, I/O cable length / communication plug(m): 3, Controller/driver mounting method: Screw mounting type

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: C (w/Motor Cover)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 200mm, Motor Option: w/Motor Cover, Rod End Thread: -, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LD, 32MM C95/CP95 DOUBLE-ACTING, 5.20290 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96NDB50-200C, CYL, TIE ROD, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NC, 50MM C95/CP95 OTHERS (COMBO), 5.35723 lb

This is a legacy product, and replaced byCP96SB80-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RD, 80MM C95/CP95 DOUBLE-ACTING, 17.98200 lb

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LE, 32MM C95/CP95 DBL-ACT AUTO-SW, 2.61406 lb

This is a legacy product, and replaced byCP96SDB80-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RE, 80MM C95/CP95 DBL-ACT AUTO-SW, 10.33231 lb

This is a legacy product, and replaced byCP96SDB80-200C-XC68, C(P)96 BASE CYLINDER, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RE, 80MM C95/CP95 DBL-ACT AUTO-SW, 11.11129 lb

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Proof pressure Operating temperature 0 to 200C Burst Pressure and Heat Resistance Performance 4.0 3.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 2.5 Pressure (MPa) 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4,

TL/TIL

Compatibility is indicated for fluid temperatures of 200C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers.

XL

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

1.1

There are many types, including perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoropolyether (HFPE), and hydrofluoroether (HFE), but they share the characteristic of high electrical insulation properties, and grades can be selected with appropriate fluidity even at low temperatures, such as 100C, and high temperatures, such as 200C and above.