Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: None, Rod End Thread: M (Male), Mounting: F (Rod Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for LEC:

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: G (Head Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: F (Rod Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for LEC: 3

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: Rod Flange, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller Mounting

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Head Flange, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 150mm, Motor Option: None, Rod End Thread: Male, Mounting: Rod Flange, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller Mounting:

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 50mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Table of Contents

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

PFA/PFW

/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow