Size: 16, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type for (LEC, JXC): CE1 (JXCE1, EtherCAT®), I/O Cable Length

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type for (LEC, JXC): CE1 (JXCE1, EtherCAT®), I/O Cable

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type for (LEC, JXC): CE1 (JXCE1, EtherCAT®), I/O Cable Length

Size: 40, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type for (LEC, JXC): JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable, Controller

Size: 16, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type for (LEC, JXC): JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable,

Size: 16, Bearing Type: Sliding Bearing, Motor Mounting: In-line Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type for (LEC, JXC): JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable, Controller

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type for (LEC, JXC): JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable,

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: In-line Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type for (LEC, JXC): JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable, Controller

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable, Controller

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable, Controller

Size: 25, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable

Air Slide Table

End plate Symbol 12 -X2128 Heat-resistant Specification (10 to 100C) Seal material and grease have been changed so that the product can be used at temperatures between 10 up to 100C. Specifications Ambient temperature 10C to 100C (No freezing) Seal material Fluororubber MXQ X2128 Standard model no.

High Vacuum Angle Valve

Heater (CE) Temperature specification Valve size 25 40 50 63 80 H4 (100C) XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 H5 (120C) XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 (2 sets) Example) For the XLA-80H5-2 with a heater, 2 sets of the XL1A25-60S-2 are required. Solenoid Valve/Plate Assembly Series Description (Construction no.)

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

C RA1 X6 S Heat resistant type Stainless steel for main part In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

Table of Contents

(Example) Inlet air temperature: 100C, Ambient temperature: 20C, Amount of air: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAA22-14 Outlet Air Temperature at Above Conditions Use outlet air temperature of 38.5C from outlet air temperature table.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

C RA1 X6 S Heat resistant type Stainless steel for main part In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

EXxx-OMK0006

Error Control Services are not set on shipment. (100C, 100D, 1016, 1017h = 0) Node Guarding Protocol and Heartbeat Protocol are not able to be used at the same time. If both Node Guarding Protocol and Heartbeat Protocol are set at the same time, the Heartbeat Protocol is used.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Symbol Specifications/Description MHR -X4 -X5 -X50 -X53 -X56 -X63 -X79 Heat resistance (100C) Auto switch installation examples and mounting positions Auto switch hysteresis Auto switch mounting Protrusion of auto switch from edge of body Fluororubber seal MHK Without magnet MHS EPDM seal/Fluorine grease Axial ported MHC Fluorine grease Grease for food MHT MHY MHW -X MRHQ MA D545 Series MHS2

HRX-OM-Y120

Indication Item Output Setting, selection and display CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V 2 CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V Analog (1) Analog output signal 1 Output 1 1 CH2 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V CH2 circulating fluid electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating