NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

JXCx-OMT0023

20 Vibration suppression control vibration frequency setting 50 60 50 Vibration suppression control resonance frequency setting 50 60 50 7 19 7.

Made to Order

B2 + Stroke S2 B1 + Stroke S1 L (mm) A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) B1 B2 L A CQ2 series 12 3.5 (32.4) 25.2 (28) 45.7 (63.9) 17 5 to 30 16 3.5 (36) 26 (30.5) 48 (70) 18.5 20 4.5 (38) 26 (31.5) 50 (74) 19.5 25 5 (39) 29 (32.5) 56.5 (76.5) 22.5 S1 S2 5 to 50 32 7 (40.5) 30.5 (33) 60.5 (80.5) 23 40 7 (50) 40 (39.5) 76.5 (96.5) 29.5 50 8 (50.5) 40.5 (40.5) 79 (99) 30.5

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Vacuum Module Series ZX

ZX 36 A VJ10 1.8 (Mounting hole) ZR Rated voltage Lead wire length Symbol Rated voltage Lead wire color Symbol L mm ZM Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.) 600 3 Gray (2 pcs.)

1

Series CQS Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) A B L 12 17 (22) 3.5 41 (51) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator

LECSA1: Single phase 100 to 120 VAC, 50/60 Hz LECSA2: Single phase 200 to 230 VAC, 50/60 Hz Main circuit power supply L2 L2 P Terminal to connect regeneration option LECSA;-S1: Not connected at time of shipping. LECSA;-S3, S4: Connected at time of shipping. If regeneration option is required for Model Selection, connect to this terminal.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Step Motor Controller

-50 for the LEPY10K-50U-R16NI.

Electric Actuator

LECSA1: Single phase 100 to 120 VAC, 50/60 Hz LECSA2: Single phase 200 to 230 VAC, 50/60 Hz Main circuit power supply L2 L2 P Terminal to connect regeneration option LECSA;-S1: No need for connection LECSA;-S3, S4: Connected at time of shipping. If regeneration option is required for Model Selection, connect to this terminal.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

CRBU

Model A B C D E(g6) F(h9) G H K L M N R S1 S2 T U V W X Y Z 12 0 -0.043 14 0 -0.043 16 0 -0.043 24 1 30 1 5-0.004 -0.012 6-0.004 -0.012 8-0.005 -0.014 34 25 21 3 29 36 48 29 18 1.5 15.5 10 0.5 10.5 10.5 M5 X 0.8 3.5 M3 X 0.5 18.5 CDRBUW15-lD 42 34.5 17 11 26 4 36 44 59 25 30 20 1.5 10 0.5 11.5 M5 X 0.8 4.5 M4 X 0.7 CDRBUW20-lD 34.5 3 25.5 3 17.5 12 50 47.5 13 29 4.5 42 52 69 25 31 22 2 12

Table of Contents

ZS-20-5A-50 . 1 pc.

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)