JXCx-OMT0002

Product Specifications . 26 4.1 Basic Specifications . 26 4.3 Parts Description . 28 4.4 Dimensions . 30 (1) Direct mounting . 30 (2) DIN rail mounting . 30 4.5 Mounting . 31 (1) Mounting. 31 (2) Grounding . 32 (3) Mounting location. 33 5. Initial Setting Method . 34 5.1 Controller setting (IP address setting) . 34 -1No. JXC-OMT0002-C The saved IP address will be lost.

JXCx-OMT0001CN

-1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41 7.

Programless controller Step motor (servo 24 VDC)

LEY16A / LEYG16A LEY16B / LEYG16B LEY16C / LEYG16C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 15 200 8 200 4 200 1 20 300 10 300 6 300 2 30 400 15 400 8 400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10

Compact Cylinder

Series CQ2 Stroke S2 Stroke S1 L B1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range A B1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

JXCx-OMT0023

Servo motor Driver LE-S1-,LE-S2LE-S3-,LE-S4LECSA2-S1 30 LECSA2-S3 30 LECSA2-S4 30 10 6 10. CHARACTERISTICS 10.4 Cable flexing life The flexing life of the cables is shown below. This graph calculated values. Since they are not guaranteed values, provide a little allowance for these values.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

Vacuum Module Series ZX

Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly. Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. Nil 0.3 m (Standard) SP 6 10 15 20 25 30 0.6 m 1 m 1.5 m ZCUK Ordering example) ZX100-K150ZECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Base Mounted Metal Seal/Rubber Seal Series VQ

S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24

Electric Actuator

40 0 0 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 Mey L2 [mm] L3 [mm] L4 [mm] L5 [mm] m L2 500 500 500 0 0 0 0 0 5 10 15 20 10 20 30 40 50 60 0 10 20 30 40 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 800 800 800 L3 600 600 600 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

CRBU

show size 30 actuators.)

Step Motor Controller

Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.

Electric Actuator

40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load